Related Manuals for Inficon PSG550
Summary of Contents for Inficon PSG550
- Page 1 Pirani Standard Gauge PSG550 PSG552 PSG554 Operating Manual Incl. EC Declaration of Conformity tina60e1-a (2011-04)
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Page 2: Product Identification
Product Identification In all communications with INFICON, please specify the infor- mation given on the product nameplate. For convenient refer- ence copy that information into the space provided below. INFICON AG, LI-9496 Balzers Model: W ; LPS tina60e1-a (2011-04) -
Page 3: Validity
Validity This document applies to products of the PSG55x series. Part numbers of standard products are indicated below. OEM products have other part numbers and different parameter settings (e.g. factory setting of setpoint) as defined in the corresponding ordering information. 3PIx-0xx-xxxx Flange 1 ⇒... -
Page 4: Tina60E1-A (2011
3PIx-0xx-xxxx Measuring 0 ⇒ 0.61 ... 10 V signal 1 ⇒ 1.2 ... 8.5 V 2 ⇒ 0.375 ... 5.529 V 3 ⇒ 1.57 ... 8.875 V Interface 0 ⇒ None (analoge) 1 ⇒ DeviceNet 2 ⇒ Profibus Receptacle 0 ⇒ FCC 1 ⇒... -
Page 5: Intended Use
They must not be used for measuring flammable or combustible gases in mixtures containing oxidants (e.g. atmospheric oxygen) within the explosion range. The gauge is intended for operation in connection with an INFICON Vacuum Gauge Controller VCG401, 402, 403 or with another suitable controller. Trademark ®... -
Page 6: Table Of Contents
Contents Product Identification Validity Intended Use Trademark Patents Scope of Delivery Safety 1.1 Symbols Used 1.2 Personnel Qualifications 1.3 General Safety Instructions 1.4 Liability and Warranty Technical Data 2.1 Output Signal vs. Pressure 2.2 Gas Type Dependence Installation 3.1 Vacuum Connection 3.2 Power Connection 3.2.1 FCC 68, 8-pin Connector 3.2.2 D-Sub, 9-pin Connector... - Page 7 Maintenance, Repair 6.1 Adjusting the Gauge 6.2 Replacing the Sensor 6.3 Troubleshooting Returning the Product Disposal Accessories Spare Parts Further Information ETL Certification EC Declaration of Conformity For cross-references within this document, the symbol (→ is used, for cross-references to further documents, listed under "Further Information", the symbol (→...
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Page 8: Safety
Safety Symbols Used DANGER Information on preventing any kind of physical injury. WARNING Information on preventing extensive equipment and environ- mental damage. Caution Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage. Notice <…> Labeling Personnel Qualifications Skilled personnel... -
Page 9: General Safety Instructions
Communicate the safety instructions to all other users. Liability and Warranty INFICON assumes no liability and the warranty becomes null and void if the end-user or third parties • disregard the information in this document • use the product in a non-conforming manner •... -
Page 10: Technical Data
Technical Data For further technical data for gauges with serial inter- faces → [3], [4], [5]. Measurement principle thermal conductance acc. to Pirani Measurement range 5×10 … 1000 mbar Accuracy (N 5×10 … 1×10 mbar ±50% of reading 1×10 … 100 mbar ±15% of reading 100 …... - Page 11 Output impedance 2 × 4.7 Ω, short circuit-proof Load impedance ≥10 kΩ <10 ms Response time Gauge identification FCC 68 (+0.61 … +10 V) 27 kΩ HV adjustment at <10 mbar Solid state relays switching functions SP1, SP2, ATM Setting range (N 5.0×10 …...
- Page 12 D-Sub 15-pin HD, RS485 INF, male Sensor cable shielded 0.14 mm /conductor Cable length ≤100 m RS232C operation ≤30 m Grounding concept → "Power Connection" Vacuum connection to signal common connected via 10 kΩ, 10 nF INFICON controllers fulfill this requirement. tina60e1-a (2011-04)
- Page 13 RS232C / RS485 interface Transmission rate 57600 baud (default) Data format binary 8 data bits one stop bit no parity bit no handshake → "Power Connection" For further information on the RS232C / RS485C interface → [3]. DeviceNet interface Specification, data format, communication protocol →...
- Page 14 Profibus interface Specification, data format, communication protocol → Interface, physical RS485 Data rate ≤12 Mbaud (→ [5]) Node address Local (Adjustable via hexadecimal <ADDRESS>, <MSD>, <LSD> switches) 00 … 7D (0 … 125 Default setting Via Profibus (hexadecimal <ADDRESS> switches set to >7D (>125 00 …...
- Page 15 Internal volume DN 16 ISO-KF 4.7 cm DN 16 ISO-KF, long tube 14.5 cm DN 16 CF-F 8 cm DN 16 CF-R, long tube 14 cm DN 25 ISO-KF 5.5 cm ® 4 VCR female 5.5 cm ® 8 VCR female 7 cm 1/8"...
- Page 16 Dimensions [mm] DN 25 ISO-KF 1/8" NPT 4 VCR 8 VCR 29.2×29.2 mm 7/16-20 UNF 24.4 4-VCR 90° tina60e1-a (2011-04)
- Page 17 DeviceNet Profibus ADDRESS ADDRESS RATE STATUS NET MOD RS485 ADDRESS RATE 3 2 1 ON tina60e1-a (2011-04)
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Page 18: Output Signal Vs. Pressure
Output Signal vs. Pressure Measurement range 0.61 … 10 V Pressure p 1E+06 1E+05 1E+04 mbar 1E+03 Torr 1E+02 1E+01 1E+00 1E–01 1E–02 1E–03 1E–04 1E–05 10.0 10.5 0.61 Output signal U [V] 0.778(U-c) p = 10 U = c +1.286log ⇔... - Page 19 Measurement range 1.2 … 8.5 V Pressure p 1E+05 1E+04 mbar 1E+03 Torr 1E+02 1E+01 1E+00 1E–01 1E–02 1E–03 1E–04 1E–05 0.0 0.5 1.0 1.5 Output signal U [V] (U-c) p = 10 ⇔ U = c + log valid in the range 5×10 mbar <p<...
- Page 20 Measurement range 0.375 … 5.529 V Signal U Pressure p [mbar] [Pa] [Torr] 0.375 <5×10 <6.65×10 <5×10 0.376 0.000133322 0.013332237 0.0001 0.377 0.000266645 0.026664474 0.0002 0.379 0.000666612 0.066661184 0.0005 0.384 0.001333224 0.133322368 0.0010 0.392 0.002666447 0.266644736 0.0020 0.417 0.006666118 0.66661184 0.0050 0.455 0.013332237...
- Page 21 Valid in the range 0.375 … 2.842 V p = a + bU + cU + dU + eU + fU –0.02585 0.04563 –0.04158 0.03767 0.1151 0.008737 where p pressure in Torr a, b, c, d, e, f constant U output signal Valid in the range 2.842 …...
- Page 22 Measurement range 1.57 … 8.875 V Pressure p 1E+05 1E+04 mbar 1E+03 Torr 1E+02 1E+01 1E+00 1E–01 1E–02 1E–03 1E–04 1E–05 0.0 0.5 1.0 1.5 1.57 8.875 Output signal U [V] (U-c) p = 10 ⇔ U = c + log valid in the range 5×10 mbar <p<...
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Page 23: Gas Type Dependence
Gas Type Dependence Indicated pressure (gauge calibrated for air) p (mbar) Freon 12 –1 Water vapor –2 –3 –3 –2 –1 (mbar) Calibration factors valid for Pirani pressure range below 1 mbar = C × indicated pressure Gas type Calibration Gas type Calibration factor C... -
Page 24: Installation
Installation Vacuum Connection DANGER DANGER: overpressure in the vacuum system >1 bar Injury caused by released parts and harm caused by escaping process gases can result if clamps are opened while the vacuum system is pressurized. Do not open any clamps while the vacuum system is pressurized. - Page 25 DANGER DANGER: protective ground Products that are not correctly connected to ground can be extremely hazardous in the event of a fault. Electrically connect the gauge to the grounded vacuum chamber. This connection must conform to the requirements of a protective connection ac- cording to EN 61010: •...
- Page 26 Mount the gauge so that no vibrations occur. The gauge may be mounted in any orientation. To keep conden- sates and particles from getting into the measuring chamber preferably choose a horizontal to upright posi- tion and consider using a seal with centering ring and filter.
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Page 27: Power Connection
• Connect the supply common with protective ground directly at the power supply. • Use differential measurement input (signal common and supply common conducted separately). • Potential difference between supply common and housing ≤18 V (overvoltage protection). INFICON controllers fulfill these requirements. tina60e1-a (2011-04) -
Page 28: Fcc 68, 8-Pin Connector
3.2.1 FCC 68, 8-pin Connector If no sensor cable is available, make one according to the following diagram. Connect the sensor cable. Ident Supply Measurement 4.7Ω signal – 4.7Ω +24V – Electrical connection Pin 1 Supply Pin 2 Supply common, GND Pin 3 Measurement signal or threshold SP1, SP2... -
Page 29: D-Sub, 9-Pin Connector
3.2.2 D-Sub, 9-pin Connector If no sensor cable is available, make one according to the following diagram. Connect the sensor cable. Ident Supply Measurement 4.7Ω signal – 4.7Ω +24V – Electrical connection Pin 1 Relay SP1, closing contact Pin 2 Gauge identification Pin 3 Supply Pin 4 Supply common, GND Pin 5 Measurement signal... -
Page 30: D-Sub, 15-Pin Hd Connector
3.2.3 D-Sub, 15-pin HD Connector If no sensor cable is available, make one according to the following diagram. Connect the sensor cable. Ident Supply Measurement 4.7Ω signal – 4.7Ω +24V – Electrical connection Pin 1,2 Gauge identification Pin 2 N.C. Pin 3 Supply Pin 4... -
Page 31: D-Sub, 15-Pin Hd, Rs485 Inf Connector
3.2.4 D-Sub, 15-pin HD, RS485 INF Connector If no sensor cable is available, make one according to the following diagram. Connect the sensor cable. 10Ω 1 Fail safe bias 2 Termination 120Ω Measurement signal 3 Fail safe 4.7Ω bias – 4.7Ω... -
Page 32: Devicenet Connector
3.2.5 DeviceNet Connector If no DeviceNet cable is available, make one according to the following diagram. Connect the DeviceNet cable. Micro-Style, 5-pin, (DeviceNet), female, soldering side Pin 1 Drain Pin 2 Supply +15 … +30 VDC Pin 3 Supply common Pin 4 CAN_H Pin 5... -
Page 33: Profibus Connector
3.2.6 Profibus Connector If no Profibus cable is available, make one according to the following diagram. Connect the Profibus cable. D-Sub, 9-pin, male, soldering side Pin 1, 2 Do not connect Pin 6 Pin 3 RxD/TxD-P Pin 7, 9 Not connected Pin 4 CNTR-P Pin 8... -
Page 34: Operation
Operation When the supply voltage is applied, the measurement signal is available at the connector (→ "Power Connection"). Allow a stabilization period of at least 10 minutes. It is advisable to operate the gauge continuously, irrespective of the pressure. The gauge is factory calibrated. Due to long time operation or contamination, a zero drift could occur. - Page 35 Liquid crystal display (LCD) Meaning no supply voltage lit green measurement / parameter mode lit red error The display can be rotated by 180 ° via the diagnostic port. Put the gauge into operation When the supply voltage is applied the software version is briefly dis- played.
- Page 36 Measurement mode Relay 1 Setpoint Status of Relay 1 open closed Relay 2 Setpoint Status of Relay 2 open closed Measurement Pirani principle Output signal Unit Millibar Torr Pascal Micron (no display) Counts Underrange Overrange (no display) Within range tina60e1-a (2011-04)
- Page 37 Parameter mode Switching functions <S> When the <SP1> or <SP2> button is pushed, the corresponding threshold is displayed and the corresponding relay flashes. Threshold Error display (trouble shooting → Pirani sensor error EEPROM error Sensor error tina60e1-a (2011-04)
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Page 38: Gas Type Dependence
, CO and N . For other gases, it has to be corrected (→ "Technical Data"). If the gauge is operated with an INFICON controller, a calibration factor for correction of the actual reading can be applied (→ the corresponding controller). - Page 39 Measurement signal (Pressure p) Hysteresis Setpoint (10% of threshold) Threshold value Time t The setpoints SP1 and SP2 are factory set to the lower measurement range limit and therefore do not switch. High Trip Point If the pressure in the vacuum system is higher than the setpoint, the corresponding LED (<SP1>...
- Page 40 High & Low Trip Point Both a High Trip Point and a Low Trip Point are assigned to each setpoint. If the pressure in the vacuum system is higher than the defined High Trip Point threshold, the corresponding LED (<SP1> or <SP2>) is lit and the corresponding relay is closed.
- Page 41 4.3.1 Adjusting the Setpoints SP1, SP2 The switching characteristics and the hysteresis can only be programmed via • the diagnostic port (→ [3]) • the DeviceNet, Profibus and RS485 interface (→ [3], [4], [5]). The thresholds of the setpoints can be adjusted via •...
- Page 42 Adjusting setpoint SP1 with button on the gauge Push the <SP1> button with a pin (max. ø1.1 mm) and keep it depressed. The gauge changes to the switching function mode and outputs the current threshold value at the measurement value output or on the LCD for about 5 s and the corresponding <S>...
- Page 43 If after programming of the hysteresis the corresponding button <SP1> or <SP2> is pushed, the factory setting of the corresponding hysteresis (10%) is reactivated. Programming setpoint SP1 Programmable parameters: Low Trip Point Low Trip Enable (→ [3], [4], [5]) Low Trip Point Hysteresis High Trip Point High Trip Enable High Trip Point Hysteresis...
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Page 44: Diagnostic Port (Rs232C Interface)
Diagnostic Port (RS232C Interface) The diagnostic port <DIA> permits to output the pressure read- ing and all status information and to enter all settings at the same time (→ [3]). → "Accessories" tina60e1-a (2011-04) -
Page 45: Devicenet Operation
DeviceNet Operation Caution Caution: data transmission errors The attempt to operate the DeviceNet gauge with the RS232C interface causes data transmission errors. This DeviceNet gauge must not be operated with the RS232C interface. Before the gauge is put into operation, it has to be configured for the DeviceNet. - Page 46 Data Rate Setting By means of the <RATE> switch, the data rate can be set to 125 (<1>), 250 (<2>) or 500 kBaud (<5>) (default 500 kBaud). If the switch is in the <P> position, the data rate is programmable via the DeviceNet (→ [4]).
- Page 47 <STATUS NET> (network status): Meaning Gauge not online: • Selftest not yet concluded • No supply, → "STATUS MOD" blinking green Gauge online but no communication: • Selftest concluded but no communica- tion to other nodes established • Gauge not assigned to any master lit solid green Gauge online;...
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Page 48: Profibus Operation
Profibus Operation Caution Caution: data transmission errors The attempt to operate the gauge with the RS232C interface causes data transmission errors. This gauge must not be operated with the RS232C interface. For operating the gauge via Profibus, prior installation of the device specific GSD file is required on the bus master side. -
Page 49: Deinstallation
Deinstallation DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts. Caution Caution: vacuum component Dirt and damages impair the function of the vac- uum component. - Page 50 Untighten the fastening screw(s) and disconnect the sensor cable. Remove gauge from the vacuum system and install the protective lid. Protective lid tina60e1-a (2011-04)
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Page 51: Maintenance, Repair
Gauge failures due to contamination and wear and tear, as well as expendable parts (e.g. filament), are not covered by the warranty. INFICON assumes no liability and the warranty becomes null and void if any repair work is carried out by the end-user or third parties. - Page 52 Press the <ADJ> button with a pin (max. ø1.1 mm) and the ATM adjustment is carried out: The Pirani sensor is ad- justed to 1000 mbar by default. Evacuate the vacuum system to p << 10 mbar and wait at least 2 minutes.
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Page 53: Replacing The Sensor
Replacing the Sensor In case of severe contamination or a malfunction, the sensor can be replaced. Precondition Gauge deinstalled (→ 49). Unscrew the hexagon socket screws and remove the sensor without twisting it. 2 mm Place the new sensor without twisting it and lock it with the screws. -
Page 54: Troubleshooting
Troubleshooting In case of an error, it may be helpful to just turn off the mains supply and turn it on again after 5 s. Problem Possible cause Correction Output signal per- Sensor cable defective or not Check the sensor cable correctly connected manently ≈... -
Page 55: Returning The Product
Contaminated products (e.g. radioactive, toxic, caustic or microbiological hazard) can be detrimen- tal to health and environment. Products returned to INFICON should preferably be free of harmful substances. Adhere to the forward- ing regulations of all involved countries and for-... -
Page 56: Disposal
Disposal DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant re- gulations and take the necessary precautions when handling contaminated parts. WARNING WARNING: substances detrimental to the environ- ment... -
Page 57: Accessories
Accessories Ordering No. Centering ring with fine filter DN 16 ISO-KF 211-097 Communication adapter (2 m) 303-333 The diagnostic software (Windows NT, XP) can be downloaded from our website. tina60e1-a (2011-04) -
Page 58: Spare Parts
Spare Parts When ordering spare parts, always indicate: • all information on the product nameplate • description and ordering number Sensor for gauge with tungsten (W) filament Ordering 3PI1-0x1-xxxx 355-925 DN 16 ISO-KF 3PI6-0x1-xxxx 3PI1-0x2-xxxx 355-926 DN 16 ISO-KF, long tube 3PI6-0x2-xxxx 3PI1-0x4-xxxx 355-927... - Page 59 Sensor for gauge with nickel (Ni) filament Ordering 3PI2-0x1-xxxx 355-936 DN 16 ISO-KF 3PI7-0x1-xxxx 3PI2-0x2-xxxx 355-937 DN 16 ISO-KF, long tube 3PI7-0x2-xxxx 3PI2-0x4-xxxx 355-938 DN 16 CF-F 3PI7-0x4-xxxx 3PI2-0x5-xxxx 355-939 DN 16 CF-R, long tube 3PI7-0x5-xxxx 3PI2-0x6-xxxx 355-940 DN 25 ISO-KF 3PI7-0x6-xxxx 3PI2-0xD-xxxx 355-943...
- Page 60 Sensor for gauge with Al coated filament Ordering 3PI3-0x1-xxxx 355-947 DN 16 ISO-KF 3PI8-0x1-xxxx 3PI3-0x2-xxxx 355-948 DN 16 ISO-KF, long tube 3PI8-0x2-xxxx 3PI3-0x4-xxxx 355-949 DN 16 CF-F 3PI8-0x4-xxxx 3PI3-0x5-xxxx 355-950 DN 16 CF-R long tube 3PI8-0x5-xxxx 3PI3-0x6-xxxx 355-951 DN 25 ISO-KF 3PI8-0x6-xxxx 3PI3-0xD-xxxx 355-954...
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Page 61: Further Information
Further Information www.inficon.com Operating Manual Single-Channel Controller VGC401 tinb01d1 German tinb01e1 English INFICON AG, LI–9496 Balzers, Liechtenstein www.inficon.com Operating Manual Two and Three Channel Measurement and Control Unit VGC402, VGC403 tinb07d1 German tinb07e1 English INFICON AG, LI–9496 Balzers, Liechtenstein www.inficon.com... -
Page 62: Etl Certification
IEC 61158 Type 3 elements: Industrial communication networks – Fieldbus specifications IEC 61784: Industrial communication networks – Fieldbus profiles www.profibus.com Profibus user organization ETL Certification ETL LISTED The product PSG55x complies with the requirements of the following standards: ANSI/UL 61010-1, Issued: 2004/07/12 Ed: 2 Rev: 2008/10/28 CAN/CSA C22.2#61010-1, Issued: 2004/07/12 Ed: 2 (R2009) -
Page 63: Ec Declaration Of Conformity
EC Declaration of Conformity We, INFICON, hereby declare that the equipment mentioned below complies with the provisions of the Directive relating to electromagnetic compatibility 2004/108/EC. Pirani Standard Gauge PSG550, PSG552, PSG554 Standards Harmonized and international / national standards and specifi- cations: •... - Page 64 LI–9496 Balzers Liechtenstein +423 / 388 3111 Fax +423 / 388 3700 reachus@inficon.com Original: German tina60d1-a (2011-04) www.inficon.com t i na60e1- a...