Related Manuals for Inficon Cube CDGsci
Summary of Contents for Inficon Cube CDGsci
- Page 1 Capacitance Diaphragm Gauge Cube CDGsci Operating Manual Incl. EC Declaration of Conformity tina88e1 (2014-01)
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Page 2: Product Identification
Product Identification In all communications with INFICON, please specify the infor- mation given on the product nameplate. For convenient refer- ence copy that information into the space provided below. Model: MAC: W; LPS Validity This document applies to products of the CDGsci series. -
Page 3: Intended Use
An integrated baffle protects the sensor against coating. Trademarks ® INFICON GmbH ® Swagelok Marketing Co. Cube™ INFICON GmbH Windows CE... -
Page 4: Scope Of Delivery
Scope of Delivery 1× gauge CDGsci 1× pin for adjusting settings via buttons 1× Calibration Test Report 1× Operating Manual English 1× Damping unit 2× LEMO connector 1× WLAN USB adapter IEEE822.11g 1× Swagelok 8VCR adapter (gauge with VCR connection only) 1×... -
Page 5: Table Of Contents
Contents Product Identification Validity Intended Use Functional Principle Trademarks Patents Scope of Delivery Safety 1.1 Symbols Used 1.2 Personnel Qualifications 1.3 General Safety Instructions 1.4 Liability and Warranty Technical Data Installation 3.1 Vacuum Connection 3.2 Power Connection 3.2.1 D-Sub, 15-pin Connector 3.2.2 RJ45, 8-pin Connector 3.2.3 LEMO, 2-pin Connector 3.2.4 USB, Typ A Connector... - Page 6 Deinstallation Maintenance, Repair Returning the Product Disposal Accessories Further Information EC Declaration of Conformity For cross-references within this document, the symbol (→ XY) is used, for cross-references to further documents, listed under "Further Information", the symbol (→ [Z]). tina88e1 (2014-01)
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Page 7: Safety
Safety Symbols Used DANGER Information on preventing any kind of physical injury. WARNING Information on preventing extensive equipment and environ- mental damage. Caution Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage. Notice <…> Labeling Personnel Qualifications Skilled personnel... -
Page 8: General Safety Instructions
Communicate the safety instructions to all other users. Liability and Warranty INFICON assumes no liability and the warranty becomes null and void if the end-user or third parties • disregard the information in this document • use the product in a non-conforming manner •... -
Page 9: Technical Data
Technical Data Measurement range → "Validity" Accuracy 0.1 F.S. 0.05% of reading 1 … 1000 F.S. 0.025% of reading Temperature effect on zero 0.1 F.S. 10 ppm F.S./ °C 1 … 1000 F.S. 5 ppm F.S./ °C Temperature effect on span 0.1 F.S. - Page 10 Output signal analog (temperature / atmosphere) Scaling temperature 10 °C – 0.00 V 60 °C – 10.00 V Temp[V] = 10+5×Aout[V] Scaling atmosphere 10 °C – 0.00 V 60 °C – 10.00 V ATM[Torr] = Aout[V]/5×1000/1.33322 Switchable between temperature and atmosphere via RS232 ASCII, REST services and website (→...
- Page 11 RS232 ASCII interface Transmission rate 9600 baud Data format binary 8 data bits one stop bit no parity bit no handshake → "Power Connection" For further information on the RS232 ASCII interface → [2]. RS232C interface Transmission rate 9600 baud Data format binary 8 data bits...
- Page 12 Supply DANGER The gauge may only be connected to power sup- plies, instruments or control devices that conform to the requirements of a grounded protective extra- low voltage (SELV) and limited power source (LPS), Class 2. The connection to the gauge has to be fused.
- Page 13 Diagnostic port connection Jack connector, 3-pin Cable length ≤2.5 m Analog output connection LEMO plug, 2-pin, with shielding coaxial Cable 2-pin plus shielding Cable length ≤1 m (0.05 mm²/conductor) Grounding concept → "Power Connection" Materials exposed to vacuum ceramics (Al ≥99.5%), stainless steel AISI 316L Internal volume...
- Page 14 Dimensions [mm] DN 16 ISO-KF DN 16 CF-R 8VCR female tina88e1 (2014-01)
- Page 15 Damping unit [mm] Magnet 4 × ø5.5 Weight (without damping unit) <1.7 kg tina88e1 (2014-01)
- Page 16 Analog Measurement Signal vs. Pressure Pressure p 1.1×F.S. 1.0×F.S. 0.9×F.S. 0.8×F.S. 0.7×F.S. 0.6×F.S. 0.5×F.S. 0.4×F.S. 0.3×F.S. 0.2×F.S. 0.1×F.S. 0.0×F.S. Measuring signal U p = (U / 10 V) × p (F.S.) Conversion Torr ↔ Pascal Torr mbar 1013.25 / 760 = 101325 / 760 = 1.00 1.3332…...
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Page 17: Installation
Installation WARNING WARNING: fragile components The ceramic sensor may be damaged by impacts. Do not drop the product and prevent shocks and impacts. Vacuum Connection DANGER DANGER: overpressure in the vacuum system >1 bar Injury caused by released parts and harm caused by escaping process gases can result if clamps are opened while the vacuum system is pressurized. - Page 18 DANGER DANGER: protective ground Products that are not correctly connected to ground can be extremely hazardous in the event of a fault. Electrically connect the gauge to the grounded vacuum chamber. This connection must conform to the requirements of a protective connection ac- cording to EN 61010: •...
- Page 19 Mount the gauge so that no vibrations occur. To keep condensates and particles from getting into the measur- ing chamber preferably choose a horizontal or upright position. Install the gauge with the damping unit in case of a horizontal mounting orientation (→ 19). The gauge may not be installed in a suspended mount- ing orientation.
- Page 20 Carefully remove two covers with e.g. a small screwdriver. Cover Keep the covers. tina88e1 (2014-01)
- Page 21 Carefully slide the gauge with both openings onto the retaining hooks until the mechanical stop is reached … Hook Hook tina88e1 (2014-01)
- Page 22 … and place it on the magnet. Magnet tina88e1 (2014-01)
- Page 23 Vacuum connection Remove the protective lid and connect the product to the vacuum system. Dichtung mit Zentrierring Schutzkappe Spannelement Keep the protective lid. tina88e1 (2014-01)
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Page 24: Power Connection
Power Connection Make sure the vacuum connection is properly made (→ 17). DANGER The gauge may only be connected to power sup- plies, instruments or control devices that conform to the requirements of a grounded protective extra- low voltage (SELV) and limited power source (LPS), Class 2. -
Page 25: D-Sub, 15-Pin Connector
3.2.1 D-Sub, 15-pin Connector If no sensor cable is available, make one according to the following diagram (cable length and conductor cross-sections → 12). Status Remote Zero Adjust Ident 15 V 14…30 V 15 V case Pin 1, 4 Relay SETPOINT 1, closing contact Pin 3... -
Page 26: Rj45, 8-Pin Connector
3.2.2 RJ45, 8-pin Connector If no Ethernet cable is available, make one according to the following diagram (cable length and conductor cross-sections → 12). Pin 1 TD+ (Transmitted data +) Pin 2 TD- (Transmitted data -) Pin 3 CT_T () Pin 4 RD+ (Received data +) Pin 5 RD-... -
Page 27: Operation
Operation Put the gauge into operation. A warm-up time of at least 90 min- utes should be allowed; for precise pressure measurements a warm-up time of at least 4 hours is required. Status Indication LED status Meaning <STATUS> no supply voltage lit solid green measurement mode blinking green... -
Page 28: Configuring The Network Interface
Configuring the network interface The network interface can be configured via the wired or the wireless network. 4.2.1 Changing IP Address of the Wired Network The standard IP address of the wired network (default 192.169.0.248 ) can be changed via •... -
Page 29: Changing Ip Address Of The Wireless Network
Precondition WLAN USB adapter is plugged in (the adapter is enclosed in the scope of delivery). The initialization of the USB adapter takes appr. 30 s. Thereafter the blue LED on the adapter lit solid or is blinking. The wireless network can be activated via •... - Page 30 − open a web browser (e.g. Mozilla Firefox, version >20, or Windows Internet Explorer, version ≥10.0) − search for wireless networks with command http://192.168.0.248/1/cmd/FAP The output is a list of SSIDs (network names), e.g. Inficon. − connect Cube with the choosen network with command: http://192.168.0.248/1/cmd/CAP%20[SSID|pass word] For networks without a password only the SSID needs to be stated.
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Page 31: Websites
An existing wireless network can be displayed by using • the RS232 ASCII command IPW, or • the REST services command http://192.168.0.248/1/cmd/IPW The output is the current IP address and the current network mask (e.g. 10.0.1.6|255.255.255.0). Websites The gauge is equipped with a web server. Via its websites user •... -
Page 32: Zeroing The Gauge
Zeroing the Gauge The gauge is factory calibrated while "standing upright" (→ "Calibration Test Report"). We recommend performing a zero adjustment, when the gauge is operated for the first time. Due to long time operation or contamination, a zero drift could occur and zero adjustment may become necessary. - Page 33 Evacuate the gauge to a pressure according to the table below: Recommended final pressure for F.S. zero adjustment <5×10 Torr <6.65×10 <5×10 mbar 1000 Torr/mbar <5×10 Torr <6.65×10 <5×10 mbar 100 Torr/mbar <5×10 Torr <6.65×10 <5×10 mbar 10 Torr/mbar <5×10 Torr <6.65×10...
- Page 34 The <ERROR> LED will continue blinking red after 8 s if • the signal output is negative (< -20 mV) when the final pres- sure has been attained • the zero adjustment has failed. <ZERO> Adjustment with Ramp Function 4.4.2 The ramp function allows to adjust the zero at a known reference pressure within the measurement range of the gauge.
- Page 35 Keep the button depressed max. ø1.1 mm Push the <ZERO> button again: Fine adjustment the zero adjustment value changes within 0...3 s: by one unit (push <ZERO> button in intervals of 1 s) Change of direction the zero adjustment changes its within 3...5 s: direction (the blinking frequency of the <ERROR>...
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Page 36: Switching Functions
Switching Functions The two switching functions can be set to any pressure within the measurement range of the gauge (→ 16). The current setpoint setting • is output at the analog port <TEMP / ATM> instead of the measurement signal (→ 25) and can be measured with a voltmeter after the <SETPOINT>... - Page 37 4.5.1 Adjusting the Setpoints The setpoints can be adjusted via • the buttons on the gauge, • the diagnostic port (→ [3]), • the RS232 interface (→ [2], [3]), • the Ethernet interface (→ [1]), • the wireless network (→ [4], [5]). DANGER DANGER: malfunction If processes are controlled via the signal output,...
- Page 38 For changing the threshold value, push the <ZERO> button and keep it depressed. The threshold keeps changing from the current value (ramp) until the button is released or until the limit of the setting range is reached. Keep the button depressed max.
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Page 39: Activating The Factory Setting (Factory Reset)
Activating the Factory Setting (Factory Reset) All user defined parameters (e.g. zero, filter) are restored to their default values. Loading of the default parameters is irreversible. Loading the default parameters: Put the gauge out of operation. Keep the <ZERO> button depressed for at least 5 s while the gauge is being put into operation (Power ON). - Page 40 WARNING WARNING: fragile components The ceramic sensor may be damaged by impacts. Do not drop the product and prevent shocks and impacts. DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated.
- Page 41 Vent the vacuum system. Put the gauge out of operation. Unfasten the lock screws and disconnect the sensor cable. Remove the gauge from the vacuum system and install the protective lid. tina88e1 (2014-01)
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Page 42: Maintenance, Repair
We recommend checking the zero at regular intervals (→ 32). INFICON assumes no liability and the warranty becomes null and void if any repair work is carried out by the end-user or third parties. -
Page 43: Disposal
Disposal DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts. WARNING WARNING: substances detrimental to the environ- ment Products or parts thereof (mechanical and electric... -
Page 44: Accessories
Calibration against Level A Standard on request (PTB Germany) Further Information www.inficon.com Communication Protocol Ethernet Interface tira88e1 (English only) INFICON AG, LI–9496 Balzers, Liechtenstein www.inficon.com Communication Protocol RS232 ASCII Interface tira89e1 (English only) INFICON AG, LI–9496 Balzers, Liechtenstein www.inficon.com ... - Page 45 Communication Protocol REST Services tira91e1 (English only) INFICON AG, LI–9496 Balzers, Liechtenstein www.inficon.com Communication Protocol Websites tira92e1 (English only) INFICON AG, LI–9496 Balzers, Liechtenstein tina88e1 (2014-01)
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Page 46: Ec Declaration Of Conformity
EC Declaration of Conformity We, INFICON, hereby declare that the equipment mentioned below complies with the provisions of the Directive relating to electromagnetic compatibility 2004/108/EC and the Directive on the restriction of the use of certain hazardous substances in electrical and electronic equipment 2011/65/EU. - Page 47 Notes tina88e1 (2014-01)
- Page 48 LI–9496 Balzers Liechtenstein +423 / 388 3111 Fax +423 / 388 3700 reachus@inficon.com www.inficon.com t i na88e1...