MICRO-EPSILON capaNCDT 6200 Operating Instructions Manual page 90

Appendix| Accessories, Service
UHV/B
All vacuum feed throughs are compatible to the connectors type B, see Chap. 4.3.
capaNCDT 6200
25 (.98)
ø13.50h6
25 (.98)
13.5 (.53)
6
(.24)
25 (.98)
ø13.50h6
SW11
Knit line
SW11
Vacuum feed through triax weldable
Max. leak rate 1x10e- mbar · l s
9
Compatible with connector type B
Vacuum feed through triax with CF16
flange
Max. leak rate 1x10e-9 mbar · l s
Compatible with connector type B
Vacuum feed through triax screwable
Max. leak rate 1x10e-9 mbar · l s
Compatible with connector type B
-1
-1
-1
Page 90