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MICRO-EPSILON capaNCDT 6200 Operating Instructions Manual page 89

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Appendix| Accessories, Service
SWH.OS.650.CTMSV
capaNCDT 6200
34
2
M10x0,75
max. 17
Vacuum feed through,
Max. leak rate 1x10e-
mbar · l s
7
Compatible with connector type B
-1
Page 89

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