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Technical Information
System Integrated Leak Detection
Manufacturers of large, complex systems may choose to integrate into those
systems a component leak detector that can facilitate the on-going maintenance of
leak-free integrity, thereby providing additional value to their customers. This unit
provides the necessary elements for flexible integration of leak detection capability
into a large system. Examples of these systems are:
Semiconductor process equipment
PVD/CVD equipment
E-beam and ion beam processing equipment.
Mass Produced Parts
Some manufacturing processes require the integration of a leak-checking device
into a multi-step process, usually with very high production rates. Component leak
detectors are designed specifically for these applications in which a vacuum
system and the control electronics may be mounted separately. This unit offers the
ultimate flexibility in a helium mass spectrometer leak detection system. The
flexibility, ruggedness and rapid response time of these units allows for accurate,
repeatable, high volume leak testing in demanding production environments. Some
examples include:
High Volume Manufactured Parts
Automotive fuel systems
Automotive brake components
Cooling and refrigeration system components
Medical devices
Automotive airbag components
Tire and wheel assemblie.
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Agilent Helium Leak Detector User Manual
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