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Technical Information
5
Select Test Configurations > Applications Setup.
6
Select PPM Sniff Method > Application Setup.
7
Ensure the system is in Test and the test port pressure adjusted between 5E-1
Torr 1 Torr.
8
Select the MFM option.
9
Input the flow rate - SCCM displayed from the MFM/MFC controller.
The leak detector is now ready to measure the concentration of Helium in PPM.
To make the connection between the power probe sniffing gun and the mass flow
meter:
1
Fit the mass flow meter on the low-pressure end with an NW25 vacuum fitting
(see the following figure).
Figure 55 Compression Port
Figure 56 Probe Configuration
2
Measure the flow rate. Write this number down for later.
3
Vent the system and remove the mass flow meter. If the test port pressure
remains constant, the flow rate should not change. Do not adjust the metering
valve on the back of the sniffing power probe without recalibrating.
4
Vent the leak detector and remove the mass flow meter, if desired for faster
helium signal response time.
5
Install the power probe back onto the leak detector and put the system into Test.
108
Agilent Helium Leak Detector User Manual
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