Maintenance Of Systems - Agilent Technologies Helium User Manual

Technical Information

Maintenance of Systems

Many vacuum process tools in fabs of all types require occasional leak checking.
This may be part of a preventative maintenance schedule or in the event of an
unexpected failure.
Downtime in either case must be minimized. A rugged, dependable, fast starting
leak detector is essential to maximize up time of production tools. Agilent Agilent
Technologies Helium Mass Spectrometer portable leak detectors keep industry
moving. Examples of some of these applications are:
Vacuum process equipment or tools
Vacuum furnaces

Vacuum coaters

Beam lines

Electron beam and ion beam process equipment

Analytical Instrument

Semiconductor process tools

Laser process equipment

Pressurized systems
Power Plants

Underground tanks, cables, and pipes

High purity gas handling systems

Bioreactors and fermenters

Liquid gas manufacturing facilities

Fuel tanks and bladders.

Agilent Helium Leak Detector User Manual 169