Temperature Control System; Cooling Water Supply - Edwards iF1800 Instruction Manual

Rapid loadlock dry pumping systems
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2.3

Temperature control system

FDP pump shut-down thermistor
Type
"Opening" temperature
"Closing" temperature
Thermocouples
FDP and HMB motor-protection thermistor type
Reference temperature
Compliant with
Water flow-switch
2.4

Cooling Water Supply

Pumps are supplied with quick release connectors. The water supply should be provided with an isolator.
Note:
Use treated water or non-corrosive industrial water to cool the iF system.
Maximum supply pressure
Typical pressure differential across supply and return
iF1800
Minimum flow rate required for reliable iF system operation
iF1800
© Edwards Limited 2009. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Figure 11 - Services connections dimensions (mm)
1. Cooling-water outlet
2. Cooling-water inlet
3. Nitrogen inlet
*
Negative Temperature
Coefficient thermistor
±
60
3 °C
±
50
4 °C
K type class 1
Positive temperature coefficient
HMB 150 °C; FDP 130°C,
(snap switch 155
±
3°C)
IEC 34-11 (BS4999 part III)
Closed when system flow > 6 l min
-1
(HMB flow > 2 l min
)
100 psig (6.9 bar, 6.9 x 10
20 psi (1.34 bar, 1.34 x 10
-1
6 l min
A533-23-880 Issue C
-1
5
Pa)
5
Pa)
Page 21

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