Figure 1 General View Of The Pumping System - Edwards T-Station 300 Instruction Manual

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Figure 1 General view of the pumping system

A. Front view (T-Station with E2M1.5
A. Front view (T-Station with E2M1.5
backing pump option)
backing pump option)
1. Turbomolecular pump connector
1. Turbomolecular pump connector
3. E2M1.5 gas ballast control
3. E2M1.5 gas ballast control
5. T-Station control unit
5. T-Station control unit
7. Backing pump
7. Backing pump
D39595880_A
D39595880_A - General description
Page 9
B. Front view (T-Station with XDD1 backing
B. Front view (T-Station with XDD1 backing
pump option)
pump option)
2. Mains input
2. Mains input
4. T-Station fixing points for bench top
4. T-Station fixing points for bench top
mounting
mounting
6. Backing pump mains connector
6. Backing pump mains connector
8. Turbomolecular pump inlet
8. Turbomolecular pump inlet
10/2020 - ©Edwards Limited

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This manual is also suitable for:

T-station next300d iso100T-station next300d cf100

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