Figure 1 General view of the pumping system
A. Front view (T-Station with E2M1.5
A. Front view (T-Station with E2M1.5
backing pump option)
backing pump option)
1. Turbomolecular pump connector
1. Turbomolecular pump connector
3. E2M1.5 gas ballast control
3. E2M1.5 gas ballast control
5. T-Station control unit
5. T-Station control unit
7. Backing pump
7. Backing pump
D39595880_A
D39595880_A - General description
Page 9
B. Front view (T-Station with XDD1 backing
B. Front view (T-Station with XDD1 backing
pump option)
pump option)
2. Mains input
2. Mains input
4. T-Station fixing points for bench top
4. T-Station fixing points for bench top
mounting
mounting
6. Backing pump mains connector
6. Backing pump mains connector
8. Turbomolecular pump inlet
8. Turbomolecular pump inlet
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