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A540-55-880 Issue D
7.3
Accessories
The accessories available for use with the iXL 600 and iXL1000 dry pump systems are described in the following
sections.
Figure 17
shows how the accessories connect to the dry pump systems.
7.3.1
Disconnect box
The disconnect box ensures full compliance with SEMI S2 by providing true EMO functionality and also provides
interlock with photohelic switch.
Item
Disconnect box 200 - 230 V 50 - 60 Hz 3 Phase, 25 A
7.3.2
Accessory modules
Two accessory modules are available for the dry pump system. The Active Accessory Module (AAM) provides
connectivity for up to three directly connected accessories including a gate valve, abatement and water flow sensor,
plus up to two supported active accessories, two thermocouples and the pump status output. The Passive Accessory
Module (PAM) allows up to 3 accessories to be connected to the accessory module interface.
An accessory module extension cable allows the AAM or PAM to be mounted up to 5 m away from the dry pump system.
Accessory module
AAM
PAM
Accessory module extension cable (5 m)
7.3.3
Pump Display Terminal (PDT)
The PDT allows control and monitoring of the dry pump system.
Item
PDT
7.3.4
PDT holster
The PDT holster retains the PDT and is attached to the pump or tool frame.
Item
PDT holster
Page 44
Table 15 - Disconnect box
Table 16 - Accessories modules
Table 17 - PDT
Table 18 - PDT holster
Edwards and the Edwards logo are trademarks of Edwards Limited.
Item number
Contact Edwards
Item number
D37480500
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D37491502
Item number
D37280700
Item number
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