Table Of Contents - Edwards iXL600 Instruction Manual

Contents
Section
1 Introduction ....................................................................................... 1
1.1 Scope and definitions ................................................................................................... 1
1.2 Applications ............................................................................................................... 2
1.3 The iXL600 and iXL1000 Systems ...................................................................................... 2
1.4 Priority of control ........................................................................................................ 5
1.5 Green Mode ............................................................................................................... 5
2 Technical data .................................................................................... 7
2.1 General technical data .................................................................................................. 7
2.2 Performance data ........................................................................................................ 8
2.3 Loading data .............................................................................................................. 9
2.4 Nitrogen purge data ....................................................................................................10
2.5 Electrical data ...........................................................................................................10
2.6 Cooling water data .....................................................................................................12
2.7 Tracer gas analysis .....................................................................................................14
3 Installation ....................................................................................... 15
3.1 Locate the dry pumping system ...................................................................................... 16
3.1.1 Seismic brackets fitting ................................................................................................16
3.2 Lubrication ............................................................................................................... 18
3.3 Connect the dry pumping system to the vacuum/exhaust system .............................................. 18
3.4 Connect to the factory extraction system (optional) .............................................................19
3.5 Connect the nitrogen supply .......................................................................................... 19
3.5.1 Flammable/pyrophoric materials .................................................................................... 20
3.5.2 Gas purges ............................................................................................................... 20
3.6 Leak test the system ...................................................................................................20
3.7 Electrical supply ........................................................................................................21
3.7.1 Mains supply cable connection ....................................................................................... 22
3.7.2 Electrical connector locking mechanism ............................................................................ 24
3.8 Connect an additional RF earth (ground) (optional) ..............................................................26
3.9 Connect to the emergency stop circuit ............................................................................. 26
3.9.1 Semi S2 requirements ..................................................................................................26
3.10 Connect and set up the cooling water ............................................................................... 27
3.11 Accessories ............................................................................................................... 27
3.12 Commission the system ................................................................................................27
3.13 Install additional safety equipment .................................................................................. 29
4 Operation ........................................................................................ 31
4.1 Start-up .................................................................................................................. 31
4.1.1 Front panel control operation ........................................................................................ 32
4.1.2 PDT operation ...........................................................................................................32
4.1.3 MicroTIM operation .....................................................................................................32
4.2 Status indicators ........................................................................................................32
4.3 Manual shut-down ......................................................................................................33
4.3.1 Shut-down modes .......................................................................................................33
4.3.2 Front panel control operation ........................................................................................ 33
4.3.3 PDT operation ...........................................................................................................33
4.3.4 MicroTIM operation .....................................................................................................33
4.4 Automatic shut-down ..................................................................................................34
4.5 Unplanned shut down and alarms .................................................................................... 34
4.6 Emergency stop .........................................................................................................35
4.7 Restart the pump after an emergency stop or automatic shut-down .......................................... 35
4.8 Advanced control and monitoring .................................................................................... 35
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A540-55-880 Issue D
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