Nitrogen Flow Meter - Edwards iXL600 Instruction Manual

A540-55-880 Issue D
6. Press the START button
7. If the system starts and continues to operate, continue at
Shut down the system: refer to

Contact Edwards.

8. For N variant pumps fitted with a gas module, the nitrogen purge flow should be checked as follows:
Check the reading on the gas module flow meter which is located at the rear of the pump

confirm the flow is 10 slm for iXL600N/iXL1000N and iXL600N/iXL1000N MFT variants (factory default
setting). The centre of the ball should be aligned to the appropriate marking on the flow tube. If NOT then
proceed as follows:
Insert the screw driver into hole 1 and adjust variable restrictor until the flow tube indicates the required

flow rate. If a different nitrogen flow rate is required please contact Edwards for further advice.
9. Look at the pressure gauge in the inlet pipeline.
If the pressure is increasing, immediately shut down the system, and contact Edwards.

If the pressure is decreasing continue at

10. After the system has been commissioned:
To continue to operate the system, refer to

To shut down the system, refer to

Page 28
(Figure 2, item 3)
Section 4.3.
Step
Section
Section 4.3.
Figure 16 - Nitrogen flow meter
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Step 8. If a warning or alarm condition is indicated:
10.
4.1.
© Edwards Limited 2015. All rights reserved.
(Figure 16) and