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Pump Mounting
Clamp & Thumbscrew
Turbo Pump
Locking Screw
Ensure all 3
locking screws
are tight
Figure 1-8.
Pumping system –
Turbo and Roughing
pumps.
Pumps
The Turbo (Turbomolecular) Pump and roughing pump start
automatically upon application of power. Both pumps will turn off if
they are overheated because of leaks, system failure or mechanical
failure.
The FlarePro uses a Turbo Pump that is connected directly to the inlet
manifold. The Turbo Pump is backed by a Roughing Pump (Figure 1-8).
Vacuum Chamber
AMETEK Electronics
Oil Mist Filter
Roughing Pump
Overview | 1-17
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Troubleshooting
