Troubleshooting (4) Trip [Options] - EBARA A70W Instruction Manual

Multi-stage dry vacuum pump
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8.4 Troubleshooting (4) TRIP [Options]

Display
TRIP:
WATER LEAKAGE
TRIP:
BACK PRESS. HIGH
TRIP:
EMG. STOP SWITCH
After taking corrective action, input RESET signal or push RESET button. The pump will
not RESET while the cause of the TRIP remains. In remote operation mode, interrupt
external START signal before resetting.
Interrupt Earth Leakage Breaker (ELB) or CB and lock out power
WARNING
before starting on wiring and maintenance work.
Do not switch on the power supply to the pump until work is
completed.
The pump casing and exhaust piping become extremely hot during
WARNING
operation and for some time after stopping.
Keep pump and exhaust piping away from contact with personnel and
flammable substances.
Do not remove the pump cover during operation.
Check for gas leaks after installing and maintaining the piping.
WARNING
Gas leaks will result in the discharge of harmful and dangerous
substances and in abnormal reactions due to the admission of air into
the pump
Symptom
Water leakage
Exhaust pressure
rises.
(0.1 MPa)
Emergency stop
switch
Check Item
Tube fitting loose
Instruments are in failure
Exhaust valve is closed
Instruments are in failure
Stop by emergency stop
button
Corrective Action
Tighten fittings
Replace instruments
Check exhaust piping
Replace instruments
Check that pump can be
operated and turn the
button head to reset
EBARA Corporation

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