EBARA A70W Instruction Manual page 29

Power
Circuit Breaker
(ELB)
Pressure Gauge
P
N2 Gas
Seal N2 Gas Flow Sensor
Regulator
Water
Dilluting N2 Gas Flow Sensor
Cooling Water Flow Sensor
[NOTE]
LCD Controller
Connector
Control Circuit
Motor Starter 1
Motor Starter 2
FT1
Selector Valve
FT2
FT3
A25S, A10S and A07V do not have a booster pump.
Figure 3.4 System Flow
Gas Inlet
Booster Pump
Motor 2
(BP)
Main Pump
Motor 1
(MP)
(15)
Gas Outlet
Check
Valve
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