EBARA A70W Instruction Manual page 20

(6)
Model
Pumping Speed (50 / 60 Hz)
Ultimate Pressure (50 / 60 Hz)
Gas Inlet
Connection
Gas Outlet
Motor
Connection
Pressure
Cooling
[Gauge Press.]
Water
Flow Rate
Temperature
Connection
Pressure
[Gauge Press.]
N
Gas
2
Approx.
Flow Rate**
Connection
Duct
Pressure
Ventilation
Approx. Flow
Rate
Lubrication Brand
Oil
Quantity
Approx. Weight
Phase/Volt/Freq.
Current Rating
Power
(50 / 60 Hz)
Supply
Connection
Control Signal
** Numerals in brackets [ ] are flow rate in dilution-0 mode.
[Note] Approximate flow rate of N
dilution N
LCD controller displays only the flow rate of dilution N
Table 3.2 Specification (A25S, A10S, A07V)
A25S
2500 / 3000 L/min
5.3 / 4.0Pa
NW50
2P 3.7 kW
17-20 Pa m
[3.4 Pa m
d50 mm×L50 mm
0.4 L
240 kg
3 Phase, 200V (50 Hz), 200-220 V (60Hz)
18.3 / 17.5 A
MS Series 22-22
gas shows a necessary total amount for seal N
2
.
2
A10S
1000 / 1200 L/min
5.3 / 4.0Pa
NW40
NW40
2P 2.2 kW
Coupler (Ｒc 3/8)
Supply
Differential Press.：Min． 0.1MPa
Min. 3.5 L/min
Max. 30 deg C
1/4" Tube Fitting (Same as Swagelok®)
Supply：0.1-0.7 MPa
［Setting：0.04-0.07 MPa］
3
/s 17-20 Pa m
3 3
/s] [3.4 Pa m
-196 Pa
3
0.5 m /min
FOMBLIN Y-L VAC 25/6
BARRIERTA J100
DEMNUM S-65
KRYTOX VPF 1525
0.4 L
220 kg
11.7 / 11.1 A
(Japan Aviation Electronics Industry)
57 Series 50 (DDK. Ltd)
A07V
700 / 840 L/min
1.1 / 1.0 Pa
NW40
2P 1.5 kW
：Ｍax． 0.4MPa
3
/s 15-19 Pa m
3
/s] [3.4 Pa m
d50 mm×L60 mm
0.5 L
150 kg
8.4 / 8.6 A
MS Series 20-4
.
2
EBARA Corporation
3
/s
/s]
and
2