EBARA A70W Instruction Manual page 26

(12)
100000
10000
1000
100
10
1
-2
10
100000
10000
1000
100
10
1
10
A70W
-1 0
10 10
A70W
-2 -1 0
10 10
Figure 3.1 Performance Curve (A70W, A30W)
A30W
1 2 3
10 10 10
A30W
1 2 3
10 10 10
[50Hz]
A70W
A30W
4 5
10 10 [Pa]
[60Hz]
A70W
A30W
4 5
10 10 [Pa]
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