Operation - EBARA A70W Instruction Manual

Multi-stage dry vacuum pump
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5.2 Operation

REMOTE / LOCAL and USE OF BUZZER can be toggled at any time. Select properly
according to the working conditions.
If Dipswitch No. 4 is ON, pump automatically stops when changed to remote mode.
The pump casing and exhaust piping become extremely hot during
WARNING
operation and for some time after stopping.
Keep pump and exhaust piping away from contact with personnel and
flammable substances.
Do not remove the pump cover during operation.
When the production process leads to reaction byproducts in the
CAUTION
pump or when the process handles corrosive gases, do not stop the
pump until after at least 30 minutes after stopping the flow of process
gases.
Purge with N
WARNING
remove the residual process gas inside the pump.
The pump will remain at a very high temperature even after it has
CAUTION
stopped. Leave the cooling water running for about one (1) hour after
shutdown.
Shutting off cooling water immediately after the pump stops causes a
pressure rise in the cooling water piping, which may cause a water
leak.
[NOTE]
Do not pump process gases until the pump has run at least one hour.
If possible, wait four hours for the pump casing temperature to
stabilize before pumping process gases.
In service observation mode "Always," cooling water and dilution N
[NOTE]
ALARMs can occur when the pump is stopped.
The pump will not start while an ALARM/TRIP signal remains active.
[NOTE]
Pressing START button will bring STARTFAIL to the display.
gas for one (1) hour or more after the pump stops to
2
2
EBARA Corporation

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