EBARA A70W Instruction Manual page 3

Multi-stage dry vacuum pump
Table of Contents

Advertisement

Rev.
Date
0
2-Jun-94
1
13-Jul-94
2
14-Nov-96
ⅴ ,ⅵ ,ⅶ
A
12-Dec-97
3
20-May-99
3A
27-Apr-01
3B
June 2002
Thruout
Record of Changes
Page
Position
5
A07V Spec.
6-10
Outline Drawing
14
Fig. 3.4
17
Fig. 4.2
21
Fig. 4.6
22
Table 4.5
Fig. 1,2,3,4,5
ⅲ ,ⅳ
Drawing
3.3 List
4
Dig. 4.4
21
Table 4.6
25
Fig. 4.7
26
Table 6.1
33
6.3
35,36
7 (8)
37
9
44,45
21
Tab. 4.2
44,45
9. Service Network
5,6,18,
-----
27,28,
32
20
iv
Contents
Newly issued
Pumping Speed
Water Sup./Rtn
Sys. Flow
Coupler
Ctrl. Wiring
Pin Assign.
Safety warning
labels
Warning label
Location
Detailed
specifications
Power Sup. Rec
Dipswitch
S.W setting
Typical check
items
Spare Parts
Pump Lifting
Service Net.
Suitable wire
Japan, Taiwan
(Add., Phone, Fax)
The Unit was
changed in terms
of Domestic
regulation for
Measurement low.
Add UL grounding
note
Add LCD "hot
surface" note
Add appendices
Language Edit
EBARA Corporation
(i)
Reason
Correction
Add NPT
Add Note
Add Drawing
Correction
Add note
Add
Add
Add List
Correction
Design Change
Design Change
Add Table
Add List
Add Note
Add List
New release
per ECO 2905
Correction
Change
-----
ETI release of
EC Rev 3 per
ECO 5394.
Third-party
marking
Third-party
marking
SEMI S2
ECO 5771

Hide quick links:

Advertisement

Table of Contents
loading

Table of Contents