EBARA A70W Instruction Manual page 5

Keep out from under the pump when it is elevated.
DANGER
Only qualified personnel should unload and lift the pump.
Be careful not to overturn the pump when pushing or pulling it
WARNING
sideways. The pump is narrow in comparison to its height.
Only a qualified electrician, observing all national and local
WARNING
regulations, should perform electrical work.
Cut and lock out electrical power before beginning wiring or
WARNING
maintenance work.
Do not switch on the power supply to the pump until work is
completed and pump and piping are back in safe operating
condition.
Supply N
WARNING
flammable or toxic gases down to a safe concentration.
Purge system with sufficient N
WARNING
the vacuum lines and exhaust piping.
Prevent dispersal of flammable, toxic or dangerous materials and
guard against their contact with the human body.
Work only in locations with an emergency escape route.
Do not convert the pump from one process to another without an
WARNING
intervening overhaul. Gases or reaction products remaining in
the pump may react and lead to accidents or to the formation of
large amounts of byproduct.
Check Safety Interlock functions periodically (every 6 months) to
WARNING
confirm correct operation. See Appendix 2 for a description of
these interlocks.
Connect exhaust from pumps handling process gases to an
WARNING
appropriate exhaust abatement system that is equipped with
discharge quality monitors to provide warnings and to shut down
the process gas flow if concentrations exceed allowable limits.
Check for gas leaks after initial installation of the piping and after
WARNING
reassembly following maintenance or, at least, annually.
leaks can result in the discharge of harmful and dangerous
substances and in abnormal reactions due to the admission of air
into the pump.
See Appendix 4.
Do not modify the pump or any of its parts without EBARA's
WARNING
approval.
Important Precautions
gas to the exhaust piping when necessary to dilute
2
2
Replace o-rings as required to correct leaks.
gas before removing and cleaning
EBARA Corporation
(iii)
Gas