EBARA A70W Instruction Manual page 27

(13)
[50Hz]
100000
10000
A25S
1000
A10S
100
10
1
-2 -1 0 1 2 3 4 5
10 10 10 10 10 10 10 10
[Pa]
[60Hz]
100000
10000
A25S
1000
A10S
100
10
1
-2 -1 0 1 2 3 4 5
10 10 10 10 10 10 10 10 [Pa]
Figure 3.2 Performance Curve (A25S, A10S)
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