EBARA A70W Instruction Manual page 28

(14)
100000
10000
1000
100
10
1
-2
10
100000
10000
1000
100
10
1
-2
10
A07V
-1 0 1
10 10 10
A07V
-1 0 1
10 10 10
Figure 3.3 Performance Curve (A07V)
[50Hz]
2 3 4
10 10 10
[60Hz]
2 3 4
10 10 10
EBARA Corporation
5
10
[Pa]
5
10
[Pa]