Table Of Contents - EBARA A70W Instruction Manual

(x)
Record of Changes......................................................................................................... i
Safety Information ......................................................................................................... ii
Important Precautions.................................................................................................. iii
Contents ......................................................................................................................... x
1 Foreword.................................................................................................................. 1
2 Introduction ............................................................................................................. 1
3 Product Description ................................................................................................ 2
3.1 Summary ........................................................................................................ 2
3.1.1 Pump Module.................................................................................... 2
3.1.2 N
2
3.1.3 Cooling Water ................................................................................... 2
3.1.4 Exhaust ............................................................................................. 2
3.2 Control System .............................................................................................. 2
3.2.1 Warning............................................................................................. 3
3.2.2 Operation Status Control................................................................. 3
3.3 Moving the Pump........................................................................................... 3
3.3.1 Preparation ....................................................................................... 3
3.3.2 Moving Method ................................................................................. 4
3.4 Detailed Specifications ................................................................................. 4
4 Installation ............................................................................................................. 16
4.1 Location ....................................................................................................... 16
4.2 Piping ........................................................................................................... 17
4.2.1 Vacuum and Exhaust Piping ......................................................... 17
4.2.2 Cooling Water Piping ..................................................................... 17
4.2.3 N
2
4.2.4 Ventilation Duct .............................................................................. 19
4.3 Electrical Wiring .......................................................................................... 20
4.3.1 Power Supply Wiring ..................................................................... 20
4.3.2 Control Signal Wiring..................................................................... 21
4.4 Operation Mode ........................................................................................... 24
5 Operation ............................................................................................................... 26
5.1 Before Starting............................................................................................. 26
5.2 Operation ..................................................................................................... 30
5.2.1 Local (Pump side) Operation ........................................................ 31
5.2.2 Remote (Distant) Operation........................................................... 31
6 Maintenance and Overhaul................................................................................... 32
6.1 Routine Inspection ...................................................................................... 32
6.2 Piping Maintenance..................................................................................... 33
6.3 Lubricant Oil ................................................................................................ 33
6.4 Spare (Maintenance) Parts List .................................................................. 34
6.5 Overhaul ....................................................................................................... 35
Contents
Gas ............................................................................................... 2
Gas Piping.................................................................................. 19
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