Operation; Before Starting - EBARA A70W Instruction Manual

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5 Operation

Following an Emergency Stop or TRIP (auto shut down), troubleshoot
WARNING
the pump as described in Section 8 before restarting.
[NOTE] These pumps are factory filled with lubrication oil.

5.1 Before Starting

Turn on the cooling water flow and check piping for water leaks.
Without sufficient cooling water, the pump temperature will rise,
CAUTION
which may cause rotor contact or other problems.
[NOTE] The pump unit has no cooling water valve.
Turn on the N gas supply.
2
Check that the regulator attached to the pump is closed, i.e. the pressure adjustment knob is
fully counterclockwise. Open the main valve and check that there are no N
the pipe connections.
Slowly turn the pressure adjustment knob clockwise to set the pressure (gauge pressure) to
0.05 MPa. Then press the red stopper to lock the knob in position.
Supply N
WARNING
flammable or toxic gases down to safe concentration.
Set N
CAUTION
carryover, corrosion inside the pump and deposition of byproducts.
Operate dilution N selector valve, located on the side face of pump cover, in accord with the
2
dilution N mode setting of dipswitch.
2
Dipswitch No. 7
Selector Valve
[NOTE]
N
[NOTE] During regular operation, open dilution N
for processes that are non-corrosive and do not produce reaction
byproducts.
gas to the exhaust piping when it is necessary to dilute
2
flow rate appropriately to avoid problems such as oil
2
CLOSED
gas flow requires several seconds to stabilize after opening valve.
2
ON
gas selector valve except
2
gas leaks from
2
OFF
OPEN
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