<Response format>
Normal processing
The internal logging data is output.
(Example) TASK1 -3.071992mm, TASK2 -2.998122mm, TASK3 2.345678mm, and TASK4 2.471249mm
• The character format is ASCII.
• The return value is right-aligned and 11 characters + delimiter.
• The unit of the measured values is nm.
• Spaces will fill any missing portion from the left.
When a command was not successfully processed/When internal logging is not stopped
E
R
CR
<Parameter explanation>
Parameter
Task number
First data number
Output data count
Internal logging data clear command <LC command>
Clear the internal logging data.
<Command format>
L
C
CR
<Response format>
Normal processing
O
K
CR
192
No-protocol Connection
3
0
7
2
9
9
2
3
4
2
4
7
Description
Sets the task number under which to obtain internal log data.
0: TASK1
1: TASK2
2: TASK3
3: TASK4
Sets the first logging data number (0 to 12800) that is acquired from beggining.
Beginning data number is "0".
Sets the logging data count (0 to 12800) that is acquired.
If stored internal logging data count is lower than setting, all logging data is acquired.
If nothing is stored, command response is ER.
1
9
9
2
8
1
2
2
5
6
7
8
1
2
4
9 CR
,
,
,
ZW User's Manual