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Omron ZN-A Series System Manual

Clean sensing system
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Clean Sensing System
ZN Series
System Manual
Cat. No. Z267-E1-01

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Summary of Contents for Omron ZN-A Series

  • Page 1 Clean Sensing System ZN Series System Manual Cat. No. Z267-E1-01...
  • Page 2 Introduction Thank you for purchasing the ZN. This manual provides only information, such as system components and setup procedures, that is required when using the ZN Series in a system. For details on product functions, performance and handling methods of individual products, refer to the Instruction Sheet packaged with the respective product.
  • Page 3 APPLICATION CONSIDERATIONS (Please Read) Introduction FEATURES Section UPGRADING THE SYSTEM Section BASIC KNOWLEDGE OF CLEAN SENSING SYSTEMS Section APPENDICES Section System Manual Clean Sensing System ZN Series...
  • Page 4 LOSS OF PROFITS OR COMMERCIAL LOSS IN ANY WAY CONNECTED WITH THE PRODUCTS, WHETHER SUCH CLAIM IS BASED ON CONTRACT, WARRANTY, NEGLIGENCE, OR STRICT LIABILITY. In no event shall responsibility of OMRON for any act exceed the individual price of the product on which liability is asserted.
  • Page 5 Performance data given in this document is provided as a guide for the user in determining suitability and does not constitute a warranty. It may represent the result of OMRON’s test conditions, and the users must correlate it to actual application requirements. Actual performance is subject to the OMRON Warranty and Limitations of Liability.
  • Page 6 Introduction Precautions for Safe Use Precautions for Safe Use The following points are important to ensure safety, so make sure that they are strictly observed. Power Supply and Wiring • When connecting multiple Air Clean Units to build a system, use a commercially available LAN cable (straight type: Category 5E or higher).

  • Page 7: Editor's Note

    Introduction Editor's Note Editor's Note Page Format Title of each section Header Indicates the contents of the page. Cross-header Overview of the section Index label Shows the chapter number and contents. Overview and points of the function described Shows the operation flow and setup method.

  • Page 8: Notational Conventions

    Introduction Editor's Note Notational Conventions Menu In this manual, menu items displayed on the screen are enclosed with [ ]. Operation procedure Operation steps are numbered to indicate their order. Visual Aids Indicates points that are important to achieve the full product performance, such as operational precautions and application procedures.

  • Page 9: Table Of Contents

    Introduction CONTENTS CONTENTS Precautions for Safe Use Editor's Note Page Format Notational Conventions CONTENTS Section 1 FEATURES What is the "Clean Sensing System?" System Features Features of the Clean Sensing System System Configuration Examples Direct Clean Sensing System Multi-Clean Sensing System Section 2 UPGRADING THE SYSTEM Before Upgrading the System Flow of Operations for Upgrading the System...

  • Page 10: Contents

    Introduction CONTENTS Section 3 BASIC KNOWLEDGE OF CLEAN SENSING SYSTEMS Feedback Control What is "Feedback?" How Feedback Control Works Clean Sensing Principle of "Particle Count" What is "Cleanliness?" Section 4 APPENDICES Maintenance Troubleshooting Troubleshooting Error Messages and Countermeasures Specifications and Dimensions List of Products INDEX Revision History...

  • Page 11: Section 1 Features

    S e c t i o n 1 FEATURES What is the "Clean Sensing System?" System Features Features of the Clean Sensing System System Configuration Examples Direct Clean Sensing System Multi-Clean Sensing System System Manual...

  • Page 12: What Is The "Clean Sensing System

    Section 1 What is the "Clean Sensing System?" What is the "Clean Sensing System?" System Features The clean sensing system continuously senses the amount of particles in a clean booth or clean bench, and controls the air volume level of the Air Clean Unit.
  • Page 13 Section 1 What is the "Clean Sensing System?" Thinnest in industry, large air volume Air Clean Unit (ZN-A Series) Unique twin-blower structure (ZN-A2502) achieves light weight and large air volume. Compact but more powerful. Incorporating a clogged main filter (HEPA) detection function.

  • Page 14: Features Of The Clean Sensing System

    Section 1 What is the "Clean Sensing System?" Features of the Clean Sensing System Feedback-based Automatic Adjustment of Air Volume The air volume level of the Air Clean Unit can be automatically controlled based on the amount of particles measured by the Air Particle Sensor. The cleanliness class in clean booths can be maintained at the optimum air volume level in proportion to the amount of particles from rapid air feed through to fine air volume operation in the power saving mode.
  • Page 15 Section 1 What is the "Clean Sensing System?" Improving Product Quality by Multi-point Measurement Since Air Clean Units and Air Particle Sensors can be connected to each other, the amount of air particles in multiple clean booths installed in processes can be comprehensively detected and controlled.
  • Page 16 Section 1 What is the "Clean Sensing System?" Simultaneous Dust Removal and Static Neutralization The Ionizer Unit ZN-J series, the first in industry to be added on later to an Air Clean Unit, provides you with a new clean environment capable of removing dust and neutralizing static electricity.

  • Page 17: System Configuration Examples

    Section 1 System Configuration Examples System Configuration Examples Direct Clean Sensing System Data Logging Clean Monitoring System Air Particle Sensor ZN-SFW11 Sensor Interface Realtime Unit Amplifier Clean Air Monitor Unit ZN-PD03 ZN-PDA11 DC power supply [Features] • Monitoring/Logging the Amount of Particles For details on settings, see p.25.
  • Page 18 Section 1 System Configuration Examples Feedback Air Clean Unit ZN-A2502 ZN-A4105 AC adapter (provided) Air Particle Sensor Or, DC power supply Sensor Amplifier Unit ZN-PD03 ZN-PDA12 Cable length: standard 2 m To extend the cable mentioned above, a commercially available LAN connector (female to female, straight type) and a LAN cable (straight type: Category 5E or higher) must be used.
  • Page 19 Section 1 System Configuration Examples Feedback and Data Logging Air Clean Unit ZN-A2502 ZN-A4105 AC adapter (provided) Or, DC power supply Clean Monitoring System Air Particle Sensor ZN-SFW11 Interface Realtime Unit Amplifier Clean Air Monitor Unit ZN-PD03 ZN-PDA12 Cable length: standard 2 m To extend the cable mentioned above, a commercially available LAN connector (female to female, straight type) and a LAN cable (straight...
  • Page 20 Section 1 System Configuration Examples Dust Removal and Static Neutralization Connection Example with Different Models (Electrostatic Sensor) Air Clean Unit ZN-A2502 ZN-A4105 AC adapter (provided) Or, DC power supply Connector cable (provided) Electrostatic ZN-J25A Sensor ZN-J41A Sensor ZJ-SD100 Ionizer Unit Clean Monitoring System Air Particle Sensor ZN-SFW12...

  • Page 21: Multi-Clean Sensing System

    Section 1 System Configuration Examples Multi-Clean Sensing System AC adapter (provided) DC power supply Air Clean Unit ZN-A2502 ZN-A4105 Commercially available LAN cable (straight type: Category 5E or higher) Air Particle Sensor Clean Monitoring System Sensor ZN-PD03 ZN-SFW12 Interface Realtime Unit Clean Air Monitor ZN-PDA11...
  • Page 22 Section 1 System Configuration Examples MEMO System Manual...

  • Page 23: Section 2 Upgrading The System

    S e c t i o n 2 UPGRADING THE SYSTEM Before Upgrading the System Flow of Operations for Upgrading the System Installing the Exclusive Monitoring Software Setup Methods Suited to Specific Applications Automatically Adjusting the Air Volume Level Monitoring/Logging the Amount of Particles Detecting the Cleanliness of Multiple Processes System Manual...

  • Page 24: Before Upgrading The System

    Section 2 Before Upgrading the System Before Upgrading the System Flow of Operations for Upgrading the System Direct Clean Sensing System Multi-Clean Sensing System Automatically Adjusting Monitoring/Logging Detecting the Cleanliness of the Air Volume Level the Amount of Particles Multiple Processes p.18 p.25 p.31...

  • Page 25: Installing The Exclusive Monitoring Software

    Section 2 Before Upgrading the System Installing the Exclusive Monitoring Software The Exclusive Monitoring Software (Realtime Clean Air Monitor) tool is provided for the ZN Series. This tool allows you to set sensing functions, acquire and collect the amount of measured particles, and display this information as a graph on a personal computer. Clean Monitoring System (ZN-SFW11/SFW12) Realtime...
  • Page 26 Section 2 Before Upgrading the System How to Install/Uninstall the Software The following describes the preparations for using Exclusive Monitoring Software. • Installing Exclusive Monitoring Software Before you install the software, quit all other programs that are running. Also, note that installation may take a long time if antivirus software is installed on the personal computer.
  • Page 27 Section 2 Before Upgrading the System Starting Up the Exclusive Monitoring Software After installation is completed, start up Exclusive Monitoring Software by the following procedure. Check that the current/voltage switch on the base of the Interface Unit is set to the side that has no tab (default).

  • Page 28: Setup Methods Suited To Specific Applications

    Section 2 Setup Methods Suited to Specific Applications Setup Methods Suited to Specific Applications Automatically Adjusting the Air Volume Level Feedback control is performed between the Air Particle Sensor and Air Clean Unit to feed in highly clean air (i.e. air containing little dust). The following describes an example where the air volume level of the Air Clean Unit is automatically adjusted.
  • Page 29 Section 2 Setup Methods Suited to Specific Applications Connecting peripheral devices Connect the Air Clean Unit to the Air Particle Sensor to supply power to the Air Clean Unit. System Configuration Examples p.8 Checking communications Check that communications between the units is being performed correctly by manually switching the air volume level of the Air Clean Unit on the Air Particle Sensor.
  • Page 30 Section 2 Setup Methods Suited to Specific Applications Display [LWIND] on the main display. Set the air volume level of the Air Clean Unit. Set the desired air volume level, and check that the air volume level is changed. (range: 1 to 5, default value: 1) Press the ENT key.
  • Page 31 Section 2 Setup Methods Suited to Specific Applications Selecting the feedback method Display [FBTYP] on the main display. Set the feedback method. Display [RAPID] on the sub-display. Press the ENT key. This sets the rapid feedback method. Setting the target cleanliness Display [CLASS] on the main display.
  • Page 32 Section 2 Setup Methods Suited to Specific Applications Setting the high power air volume level Display [HWIND] on the main display. Set the high power air volume level of the Air Clean Unit. Set the air volume level within 1 to 5 (default value: 5). Set the air volume level for when the target cleanliness is not satisfied.
  • Page 33 Section 2 Setup Methods Suited to Specific Applications 4-2. Constant feedback Set this method to stabilize cleanliness in the booth (area) at all times. Selecting the air volume level control method Display [CNTRL] on the main display. Select [AUTO]. Set air volume level control of the Air Clean Unit to automatic.
  • Page 34 Section 2 Setup Methods Suited to Specific Applications Press the ENT key. This sets the specified target value. Setting the low power air volume level Display [LWIND] on the main display. Set the low power air volume level of the Air Clean Unit. Set the air volume level within 1 to 5 (default value: 1).

  • Page 35: Monitoring/Logging The Amount Of Particles

    Section 2 Setup Methods Suited to Specific Applications Monitoring/Logging the Amount of Particles Measured particle values can be easily captured on a personal computer by using an Interface Unit (sold separately) and the Exclusive Monitoring Software. The following describes an example where the amount of particles is displayed as a trend graph and is saved as data.
  • Page 36 Section 2 Setup Methods Suited to Specific Applications Connecting peripheral devices Connect the Air Clean Unit, Air Particle Sensor, Interface Unit, and the personal computer, and turn the power supply of all of these devices ON. Before connecting these devices, turn their power supplies OFF. System Configuration Examples p.7, p.9 Checking system operation Make sure that the Air Particle Sensor and Interface Unit have started up normally.
  • Page 37 Section 2 Setup Methods Suited to Specific Applications 4-1. Displaying trend graphs Display the amount of particles as a trend graph. Start up Exclusive Monitoring Software. Starting Up the Exclusive Monitoring Software p.17 Click the [Graph] button and then [Edit graph] button to display the Edit Graph screen.
  • Page 38 Section 2 Setup Methods Suited to Specific Applications Click the [Set] button. Align the scales of the horizontal and vertical axes. Sets the scale of the horizontal axis. Sets the scale of the vertical axis. Sets the value at the center of the vertical scale. Sets the vertical axis to a scale that allows all waveforms to be displayed.
  • Page 39 Section 2 Setup Methods Suited to Specific Applications 4-2. Data logging Data logging saves the trends for the amount of particles in a clean booth as data. Start up the Exclusive Monitoring Software. Starting Up the Exclusive Monitoring Software p.17 Click the [Logging] button to display the Logging screen.
  • Page 40 Section 2 Setup Methods Suited to Specific Applications 5-2. Starting logging Click the [Exe.] button to start Logging. System Manual...

  • Page 41: Detecting The Cleanliness Of Multiple Processes

    Section 2 Setup Methods Suited to Specific Applications Detecting the Cleanliness of Multiple Processes The cleanliness of multiple processes can be verified at each individual process by multiple Air Particle Sensors and multiple Air Clean Units. The air volume level also can be controlled on individual equipment or booth (area).
  • Page 42 Section 2 Setup Methods Suited to Specific Applications Setting the ID of the Air Clean Unit Set DIP switch SW1 on the rear of the Air Clean Unit to ON (external communications control enabled). Set each of the channels (1 to n) by the ID rotary switch on the rear of the Air Clean Unit.
  • Page 43 Section 2 Setup Methods Suited to Specific Applications Click the [IFU Settings] button to display the Settings for Interface Unit screen. In the Settings for Interface Unit screen, set the control conditions. Set the information of the Air Clean Units and Air Particle Sensors located in the areas, and the method for controlling the air volume level of the target areas.
  • Page 44 Section 2 Setup Methods Suited to Specific Applications • For the high power air volume level, always set an air volume greater than the low power air volume level. Feedback will not function properly if a smaller value is set. •...

  • Page 45: Section 3 Basic Knowledge Of Clean Sensing Systems

    S e c t i o n 3 BASIC KNOWLEDGE CLEAN SENSING SYSTEMS Feedback Control What is "Feedback?" How Feedback Control Works Clean Sensing Principle of "Particle Count" What is "Cleanliness?" System Manual...

  • Page 46: Feedback Control

    Section 3 Feedback Control Feedback Control What is "Feedback?" "Feedback" is the control of the air volume level of the Air Clean Unit in proportion to the amount of particles to maintain the cleanliness of target spaces. The ZN series incorporates the "FO feedback"...
  • Page 47 Section 3 Feedback Control • Multi-Clean Sensing System In this system, the cleanliness of multiple areas is managed by multiple Air Particle Sensors and multiple Air Clean Units. The Interface Units acquire the data from the Air Particle Sensors that are connected together to perform feedback processing on the entire system.
  • Page 48 Section 3 Feedback Control Feedback Methods There are two feedback methods, "rapid feedback" and "constant feedback." • Rapid feedback When cleanliness has deteriorated, rapid feedback quickly increases the air volume level to recover the cleanliness. This feedback method is effective in environments with relatively lots of change. (1) The air volume level is (3) The air volume level is changed to high power when...
  • Page 49 Section 3 Feedback Control • Constant feedback The air volume level is altered so that the cleanliness stabilizes at the target value. This feedback method is effective in environments with relatively little change since the cleanliness is maintained at the bare minimum air volume level. (1) The air volume level is increased a level when the target cleanliness is about...

  • Page 50: How Feedback Control Works

    Section 3 Feedback Control How Feedback Control Works The following describes the "flow of data for feedback" and "measurement processing flow" during feedback control for each system configuration. Direct Clean Sensing System • Flow of data for feedback Air Clean Unit Area 1 Control signal Air Particle Sensor...
  • Page 51 Section 3 Feedback Control • Flow of processing on the Air Particle Sensor Start of measurement Measurement result calculated for each measurement time Air Particle Sensor Measurement result 2000 Measurement result table (example) Setting values Measured air volume level to be used Target level calculated based on feedback parameters...
  • Page 52 Section 3 Feedback Control Multi-Clean Sensing System • Flow of data for feedback Air Clean Unit Area 1 Area 2 Air Particle Sensor ZN-SF21 Control signal Interface Unit In a system configured as shown above: (1) The amount of particles in area 1 is detected by the sensors on channels 1ch and 2ch, and the amount of particles in area 2 is detected by the sensors on channels 3ch and 4ch, the measurement result is calculated by the Amplifier Unit, and the result is transferred to the Interface Unit.
  • Page 53 Section 3 Feedback Control • Flow of processing on Interface Unit The following shows an example of processing flow during measurement and the data to be used when feedback processing is performed under the following conditions: • The Air Clean Unit (ID:1) is controlled based on the larger value of the Air Particle Sensors on channels 1ch and 2ch.

  • Page 54: Clean Sensing

    Section 3 Clean Sensing Clean Sensing Principle of "Particle Count" The ZN-PD series judges the cleanliness of target spaces by measuring the amount of particles (dust or dirt) floating in the air. The amount of particles is measured using the "fan method" and "scattered light method"...

  • Page 55: What Is "Cleanliness

    Section 3 Clean Sensing What is "Cleanliness?" Cleanliness is expressed by the size, number and weight of polluting substances (dust, dirt, etc.) contained in a fixed area or volume. The degree of cleanliness that is indicated by the amount of dust or dirt contained in specific air is called the "cleanliness level."...
  • Page 56 Section 3 Clean Sensing MEMO System Manual...

  • Page 57: Section 4 Appendices

    S e c t i o n 4 APPENDICES Maintenance Troubleshooting Troubleshooting Error Messages and Countermeasures Specifications and Dimensions List of Products INDEX System Manual...

  • Page 58: Maintenance

    For details on inspection and maintenance, refer to the Instruction Sheet for the respective product. Air Clean Unit ZN-A series filters are in a double-filter structure comprising a HEPA filter and a pre- filter, and filter air that is sucked in.
  • Page 59 Replace the discharge needles if the cleaning warning indicator stays lit after they are cleaned. If the cleaning warning indicator lights even after replacing the discharge needles, contact your OMRON representative. For details on how to replace the discharge needles, refer to the Instruction Sheet for the Ionizer Unit.

  • Page 60: Troubleshooting

    Section 4 Troubleshooting Troubleshooting Troubleshooting This section describes countermeasures for temporary device problems. Check the malfunction in this section before sending the hardware for repair. For details on how to connect devices, refer to the Instruction Sheet for the respective product. Problem Probable cause and possible countermeasure Pages...

  • Page 61: Error Messages And Countermeasures

    The fan is rotating irregularly. Turn the fan power supply OFF then back ON again. If turning the power supply OFF then back ON again does not remedy the problem, contact your OMRON representative. The fan has reached the end of its Turn the fan power supply OFF then back ON again.
  • Page 62 Section 4 Troubleshooting Air Particle Sensor (ZN-PDA Series) [Main display] Display Error Countermeasure E-SEn The Sensor fan or laser is in error Check the connection with the Sensor and Amplifier (flashing) or has deteriorated. Unit, and turn the power supply OFF then back ON again.

  • Page 63: Specifications And Dimensions

    Section 4 Specifications and Dimensions Specifications and Dimensions Air Clean Unit ZN-A2502/A2502D (Unit: mm) 97.5 4-M4, depth 17 226.6 ON/OFF switch Air volume level switch Operation indicator Operation indicator Air volume level indicator ZN-A4105/A4105D (Unit: mm) 129.5 4-M5, depth 20 Air volume level switch ON/OFF switch Operation indicator...
  • Page 64 Section 4 Specifications and Dimensions Item ZN-A2502/A2502D ZN-A4105/A4105D Air outlet dimension 225 x 205 mm 360 x 360 mm Particle outlet efficiency More than 99.99% for 0.3 µm particles Air volume (m /min) 0.3 to 1.8 m /min (typical) 1.0 to 5.0 m /min (typical) Sound noise level (dB) Air volume level 3: 53 dB (typical)
  • Page 65 Section 4 Specifications and Dimensions Ionizer Unit ZN-J25/J25A (Unit: mm) Ion balance adjustment buttons Power indicator Power input /signal output connector (green lit) Cleaning notice indicator (orange flashing) /cleaning warning indicator (orange lit) GND terminal Error output indicator (red flashing) AC adapter terminal 25.50 Discharge needles (4)
  • Page 66 (*1) Measurement conditions: Distance 300 mm, Air Clean Unit: ZN-A series with air level 5, At center of air outlet, Neutralization: From ±1000 V down to ±100 V with Charge Plate monitor (150 x 150 mm, 20 pF) Temperature: 18 to 28°C, Humidity: 35 to 55%...
  • Page 67 Section 4 Specifications and Dimensions Air Particle Sensor • Sensor ZN-PD03 (Unit: mm) Mounting screw holes Suction inlet 2-M4, depth 6 Round vinyl insulated cable 5.2 mm dia., 10-wire Standard length: 0.5 m 70 ± 0.1 2-4.2 mm dia. Exhaust outlet Mount hole dimensions When sensor mounting bracket (ZN9-PB1, sold separately) is used (Unit: mm)
  • Page 68 Section 4 Specifications and Dimensions Item ZN-PD03 Available Amplifier Unit ZN-PDA11/ZN-PDA12 Measurement method 90° sideway light-scattering method Light source Semiconductor laser Available particle size 0.3 µm/0.5 µm/1.0 µm Available cleanliness class Class100 to 100,000 corresponding (FED-STD-209D) Indicator Level indicator for Class100 to 100,000 (FED-STD-209D) Suction tube Inside diameter: 4 mm, Length: 1 m max.
  • Page 69 Section 4 Specifications and Dimensions • Amplifier Unit ZN-PDA11 Power indicator Wide range indicator (Unit: mm) Unit indicator Main display indicator OUT1 indicator Sub-display indicator OUT2 indicator 64.3 (133) 36.8 Round vinyl insulated cable Round vinyl insulated cable 5.1 mm dia. standard 100 mm 5.2 mm dia.
  • Page 70 Section 4 Specifications and Dimensions Item ZN-PDA11 ZN-PDA12 Sampling time 1 to 599 s (selectable) Average count setting 1/2/4/8/16/32/64 Indicator Operation indicators: OUT1 (orange), 7-segment main display (red), 7-segment OUT2 (yellow), 7-segment main display sub-display (yellow), (red), 7-segment sub-display (yellow) Power (green), wide range display Power (green), wide range display (green), unit selection display (green)
  • Page 71 Section 4 Specifications and Dimensions I/O Circuit Diagram NPN type (ZN-PDA11) Brown 24 VDC Caution judgment Load output I/O switch Load 24 VDC White Reset input Warning judgment Gray output Blue GND (0V) External I/O Brown (1) 24 VDC Blue (2) GND (0V) Gray (3) Warning judgment output...
  • Page 72 Section 4 Specifications and Dimensions • Calculating Unit ZX-CAL2 (Unit: mm) 24.9 15.1 54.9 36.7 Item ZX-CAL2 Available Amplifier Unit ZN-PD series, ZX series, ZJ-SD series Current consumption 12 mA or less (supplied from the Amplifier Unit) Ambient temperature Operating: 0 to 50°C, Storage: -15 to +60°C (with no icing or condensation) Ambient humidity Operating and storage: 35 to 85% (with no condensation) Connection method...
  • Page 73 Section 4 Specifications and Dimensions Interface Unit for Clean Monitoring System ZN-SF11 (Unit: mm) Sensor communications indicator (busy) Connector Sensor communications indicator (communications error) Power indicator External terminal communications indicator (busy) External terminal communications indicator (communications error) 64.3 (336) (46) 36.8 Round vinyl insulated cable 5.2 mm dia.
  • Page 74 Section 4 Specifications and Dimensions Connector Pin Arrangement and Connection Example with Personal Computer ZN-SF11/SF12 side Personal computer side (PC/AT compatible) Connect the ZN-SF11/SF12 and the personal computer using a 9-pin D-sub cross cable (female-female). Pin No. Name Pin No. Name N.C.
  • Page 75 Section 4 Specifications and Dimensions Clean Monitoring System Item ZN-SFW11 ZN-SFW12 Power supply voltage Supplied from ZN-PDA Current consumption 45 mA with 24 VDC without Amplifier Unit Available Sensor Amplifier ZX series, ZJ-SD series, ZN-PD series Available Sensor Amplifier ZX-LDA__-N V1,000 or higher software version ZX-EDA__ V1,300 or higher...

  • Page 76: List Of Products

    Section 4 List of Products List of Products Air Clean Unit • Main unit Type Model Remarks 250 mm Square ZN-A2502 250 mm Square ZN-A2502D Without AC adaptor 410 mm Square ZN-A4105 410 mm Square ZN-A4105D Without AC adaptor When connecting multiple Air Clean Units to build a system, use a commercially available LAN cable (straight type: Category 5E or higher).
  • Page 77 Section 4 List of Products Air Particle Sensor • Main Unit Type Model Remarks Sensor ZN-PD03 Amplifier Units ZN-PDA11 Cable type 2 m ZN-PDA12 Connector type 2 m • Accessories Type Model Remarks Calculating Unit ZX-CAL2 Double-ended connector ZX-XC1A 1 (for extension between Sensor and Amplifier Unit) cable 1 m Double-ended connector ZX-XC4A...
  • Page 78 Section 4 List of Products MEMO System Manual...

  • Page 79: Index

    Section 4 INDEX INDEX Neutralization 6, 10 Accessories List of Products Electrostatic Sensor Air Clean Unit Error Messages Dimensions Exclusive Monitoring Software Error Messages Exiting Indicator Installing List of Products Operating Environment Maintenance Starting Up Specifications Uninstalling Air Particle Sensor Dimensions 57, 59 Feedback...
  • Page 80 Section 4 INDEX Principle of "Particle Count" Rapid feedback 20, 38 Scattered light method Setting the feedback conditions 20, 32 Specifications Air Clean Unit Air Particle Sensor 58, 60 Calculating Unit Clean Monitoring System Ionizer Unit Static Electricity Sensor Troubleshooting System Manual...
  • Page 81 Section 4 INDEX MEMO System Manual...

  • Page 82: Revision History

    Section 4 Revision History Revision History A manual revision code appears as a suffix to the catalog number at the bottom of the front and back covers of this manual. Z267-E1-01 Cat. No. Revision code Revision code Date Revised contents June 2007 Original production System Manual...
  • Page 83 OMRON ELECTRONICS LLC One Commerce Drive Schaumburg, IL 60173-5302 U.S.A. Tel: (1) 847-843-7900/Fax: (1) 847-843-7787 OMRON ASIA PACIFIC PTE. LTD. No. 438A Alexandra Road # 05-05/08 (Lobby 2), Alexandra Technopark, Singapore 119967 Tel: (65) 6835-3011/Fax: (65) 6835-2711 OMRON (CHINA) CO., LTD.

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Zn-a2502Zn seriesZn-pd seriesZn-j seriesZn-a2502dZn-a4105d ... Show all

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