Command Format
Measurement command <MS command>
Acquires the current measured value.
* The same can be processed with the M, MEASURE command, which is in a ZS series format.
<Command format>
M
S
↑ Space
<Response format>
Normal measurement (Task numbers 0 to 3)
(Example) -30.719923mm
−
• The return value is right-aligned and 11 characters + delimiter.
• The unit of the measured values is nm.
• Spaces will fill any missing portion from the left.
• If the task number is omitted, the measured value displayed is acquired.
Normal measurement (Task number 4)
(Example) TASK1 -3.071992mm, TASK2 -2.998122mm, TASK3 2.345678mm, and TASK4 2.471249mm
When measurement is not possible
−
−
−
When a command was not successfully processed
E
R
CR
180
No-protocol Connection
∗
CR
↑ Task number
3
0
7
−
3
0
−
2
9
2
3
2
4
−
−
−
−
1
9
9
2
7
1
9
9
9
8
1
2
4
5
6
7
7
1
2
4
−
−
−
−
3 CR
,
2
2
,
8
,
9 CR
CR
ZW User's Manual