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Specifications
E5010C Spinstand Specifications
E5010C Spinstand Specifications
NOTE
E5010C is the obsolete product.
X-Y Stage (Coarse Positioning Stage):
Table 6-57
Stage Type:
Stage Travel :
Linear Scale Resolution:
Position Repeatability :
Position Accuracy:
Skew Range:
Piezo Stage (Fine Positioning Stage):
Table 6-58
Stage Type:
Stage Travel :
Travel Resolution:
Positioning Repeatability:
Asynchronous Positioning Jitter:
Spindle:
Table 6-59
RPM :
RPM Accuracy:
RPM Jitters:
Asynchronous Rotational Error:
Rotational Direction :
Clamp Size:
Bearing:
Motor:
338
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Air Bearing, dual axis stage with vacuum lock down feature
140 mm × 100 mm (5.5" × 4")
100 nm (4 µ")
5 µm (200 µ")
15 µm (600 µ") @ 23±1 °C
°
−30° to +30
Piezo translator operated flexure substage
15 µm (600 µ")
1.7 nm (0.07 µ")
1.7 nm (0.07 µ"), 1 σ @ ±1 µm
1.7 nm (0.07 µ"), 1 σ @ ≤ 15,000 rpm
1,000 to 20,000 rpm
±0.0005 % @ 15,000 rpm (typical)
±0.0025 % @ 15,000 rpm (typical)
1 µ" axial/radial @ > 3,000 rpm
CW, CCW
1.8", 2.5", 3.0/3.5"
Air Bearing
Brushless DC, programmable
Chapter 6
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