Error Messages
Error Messages on the LCD of the Spinstand Controller
Error Messages on the LCD of the Spinstand Controller
The table below shows the error messages that could appear in the LCD on the front panel
of the spinstand.
Error Message for LCD on the Spinstand Front Panel
Error Message
Neg Limit Fault, Axis (1, 3)
Pos Limit Fault, Axis (1, 3)
Amp Fault, Axis (1, 3 or 5)
Encoder error, Axis (1, 3 or 5)
Air Interlock Fault
388
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*1
*1.Axis 1 : X stage (Spindle Stage) , Axis 3: Y stage (HLM Stage), Axis 5: spindle
Description
The encoder of X or Y stage is over the limit. Reset
the spinstand.
The encoder of X or Y stage is over the limit. Reset
the spinstand.
Amplifier could be in malfunction. Contact the
Agilent Technologies office.
The encoder might be in malfunction. Contact the
Agilent Technologies office.
The spinstand is out of air or vacuum or emergency
switch has been turned on. Check if air or drawn
air is supplied to the spinstand or reset the
emergency switch.
Appendix B