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Specifications
E5010B Spinstand Specifications
E5010B Spinstand Specifications
NOTE
E5010B is the obsolete product.
X-Y Stage (Coarse Positioning Stage):
Table 6-52
Stage Type:
Stage Travel :
Linear Scale Resolution:
Position Repeatability :
Position Accuracy:
Skew Range:
Piezo Stage (Fine Positioning Stage):
Table 6-53
Stage Type:
Stage Travel :
Travel Resolution:
Position Accuracy:
Position Repeatability:
Spindle:
Table 6-54
RPM :
RPM Accuracy:
RPM Jitters:
Asynchronous Rotational Error:
Asynchronous Position Jitters:
(Non Repeatable Runout)
Rotational Direction :
Clamp Size:
Bearing:
336
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Air Bearing, dual axis stage with vacuum lock down feature
140 mm × 100 mm (5.5" × 4")
100nm (4 µ")
5 µm (200 µ")
15 µm (600 µ")
o
o
+30
(max), -60
(min)
Piezo translator operated flexure substage
15 µm (600 µ")
2.5 nm (0.1 µ")
50 nm (2 µ")
5 nm (0.2 µ"), 1 σ
1,000 to 15,000 rpm
0.1 % @ ≥3,000 rpm
0.01 % @ ≥3,000 rpm
1 µ" axial/radial @ ≥3,000 rpm
< 10 nm (< 0.4 µ"), 1 σ
CW, CCW
2.5", 3.0/3.5"
Air Bearing
Chapter 6
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