Current Measurement Accuracy - Tektronix KEITHLEY System SourceMeter 2636B Reference Manual

Appendix A: Calibration

Current measurement accuracy

Follow the steps below to verify that Series 2600B current measurement accuracy is within specified
limits. The procedure involves applying accurate currents from the Series 2600B current source and
then verifying that Series 2600B current measurements are within required limits.
1. With the power off, connect the digital multimeter to the Series 2600B terminals as shown in the
figure titled "Connections for 100 nA to 1 A current ranges" in
page A-7).
2. Select the multimeter DC current function.
3. Select the Model 2602B/2604B/2612B/2614B/2634B/2636B single-channel display mode.
4. Set the Series 2600B SMU to both source and measure current by pressing the SRC and then
the MEAS keys. Make sure the source output is turned on.
5. Verify measure current accuracy for each of the currents listed using the values listed in the
following table for your model number. For each measurement:

Select the correct source range.

Set the Series 2600B output current such that the digital multimeter reading is the value
indicated in the source current column of the table below. It may not be possible to set the
current source to get exactly the required reading on the digital multimeter. Use the closest
possible setting and modify the reading limits accordingly.

If necessary, press the TRIG key to display readings.

Verify that the Series 2600B current reading is within the limits given in the table below.
6. Repeat the procedure for negative calibrator currents with the same magnitudes as those listed.
Model 2601B/2602B/2604B current measurement accuracy limits
Source and measure range
100 nA
1 µA
10 µA
100 µA
1 mA
10 mA
100 mA
1 A
3 A
1. Measure range coupled to source range when simultaneously sourcing and measuring current.
2. As measured by precision digital multimeter. Use closest possible value, and modify reading limits
accordingly if necessary. See
A-10
Series 2600B System SourceMeter® Instrument Reference Manual
1 2
Source current
90.000 nA
0.9000 µA
9.0000 µA
90.000 µA
0.9000 mA
9.0000 mA
90.000 mA
0.90000 A
2.4000 A
Measurement limit calculations
Current source accuracy
Current reading limits (1 year,
18° C to 28° C)
89.855 nA to 90.145 nA
0.89928 µA to 0.90073 µA
8.9963 µA to 9.0038 µA
89.957 µA to 90.043 µA
0.89962 mA to 0.90038 mA
8.9957 mA to 9.0043 mA
89.962 mA to 90.038 mA
0.89823 A to 0.90177 A
2.3953 A to 2.4047 A
(on page A-4).
2600BS-901-01 Rev. E / January 2019
(on