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EXT70/NW40
Edwards EXT70/NW40 Manuals
Manuals and User Guides for Edwards EXT70/NW40. We have
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Edwards EXT70/NW40 manual available for free PDF download: Instruction Manual
Edwards EXT70/NW40 Instruction Manual (42 pages)
Turbomolecular Pumps
Brand:
Edwards
| Category:
Water Pump
| Size: 1 MB
Table of Contents
Table of Contents
3
Introduction
7
Scope and Definitions
7
Description
8
Cross-Section View of EXT70 Turbomolecular Pump
9
Cross-Section View of EXT250 Turbomolecular Pump
10
Vent Options and Vent Control
11
Technical Data
13
Operating Conditions
13
Mechanical Data
13
Performance
14
EXT250 Performance Data
15
Pumping Media
16
EXT70 and EXT250 Pumps Without Gas Purge
16
EXT250 Pumps with Gas Purge
16
Vent Gas Specification and Vent Control Data
17
Maximum Allowed Rate of Pressure Rise During Venting: System Pressure
17
Purge Gas Specification (for EXT250 Only)
18
Cooling-Water
18
EXT70 Turbomolecular Pump Dimensions (MM)
19
EXT250 Turbomolecular Pump Dimensions (MM)
20
Installation
21
Unpack and Inspect
21
Typical Installation
21
Typical Pumping System
22
Connect to the Vacuum System
23
Inlet-Screen
23
Mechanical Fixing
23
Correct Installation of the Inlet-Screen
23
Base Mounting
24
Inlet Connection and Orientation
24
Backing Connection
25
Vent-Valve Connection and Control
25
Purge Gas Connection (EXT250 Only)
26
Connect the Purge Gas
26
Recommended Purge Gas Flow
26
Electrical Installation
26
Cooling
26
Cooling Methods
27
Forced-Air Cooling
27
Water-Cooling
27
Operation
29
Start-Up
29
Stand-By
29
Shut-Down
30
Safety Interlocks and Control System
30
Bakeout
30
Maintenance
31
Introduction
31
Bearing Life
31
Rotor Life
31
Clean the Pump
31
Fault Finding
32
Storage and Disposal
35
Storage
35
Disposal
35
Service, Spares and Accessories
37
Introduction
37
Service
37
Spares
37
ISX Inlet-Screen
37
WCX Water-Cooler
37
Inlet-Flange Seals
38
Accessories
38
Installation
38
EXC Controller
38
Pump-To-Controller Cable
38
Installation of Optional Accessories (and Spares)
39
BX Bakeout Band
40
FL20K Foreline Trap
40
TAV Vent Valve and Vent-Port Adaptor
40
ACX Air-Cooler
40
Vibration Isolators
41
PRX Purge Restrictor
41
VRX Vent-Restrictor
41
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