Edwards EXT70/ISO63 Turbo Vacuum Pump Manuals

Manuals and User Guides for Edwards EXT70/ISO63 Turbo Vacuum Pump. We have 1 Edwards EXT70/ISO63 Turbo Vacuum Pump manual available for free PDF download: Instruction Manual

Edwards EXT70/ISO63 Instruction Manual

Edwards EXT70/ISO63 Instruction Manual (42 pages)

Turbomolecular Pumps

Brand: Edwards | Category: Water Pump | Size: 1 MB

Table of Contents

Table of Contents
3
Introduction

7
Technical Data

13
Installation

21
- Unpack and Inspect
  21
- Typical Installation
  21
- Typical Pumping System
  22
- Connect to the Vacuum System
  23
- Inlet-Screen
  23
- Mechanical Fixing
  23
- Correct Installation of the Inlet-Screen
  23
- Base Mounting
  24
- Inlet Connection and Orientation
  24
- Backing Connection
  25
- Vent-Valve Connection and Control
  25
- Purge Gas Connection (EXT250 Only)
  26
- Connect the Purge Gas
  26
- Recommended Purge Gas Flow
  26
- Electrical Installation
  26
- Cooling
  26
- Cooling Methods
  27
- Forced-Air Cooling
  27
- Water-Cooling
  27
Operation

29
- Start-Up
  29
- Stand-By
  29
- Shut-Down
  30
- Safety Interlocks and Control System
  30
- Bakeout
  30
Maintenance

31
- Introduction
  31
- Bearing Life
  31
- Rotor Life
  31
- Clean the Pump
  31
- Fault Finding
  32
Storage and Disposal

35
- Storage
  35
- Disposal
  35
Service, Spares and Accessories

37
- Introduction
  37
- Service
  37
- Spares
  37
- ISX Inlet-Screen
  37
- WCX Water-Cooler
  37
- Inlet-Flange Seals
  38
- Accessories
  38
- Installation
  38
- EXC Controller
  38
- Pump-To-Controller Cable
  38
- Installation of Optional Accessories (and Spares)
  39
- BX Bakeout Band
  40
- FL20K Foreline Trap
  40
- TAV Vent Valve and Vent-Port Adaptor
  40
- ACX Air-Cooler
  40
- Vibration Isolators
  41
- PRX Purge Restrictor
  41
- VRX Vent-Restrictor
  41

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