Edwards EXT70/200H Manuals

Manuals and User Guides for Edwards EXT70/200H. We have 2 Edwards EXT70/200H manuals available for free PDF download: Instruction Manual

Edwards EXT70/200H Instruction Manual (40 pages)

Split Flow Compound Turbomolecular Pumps

Brand: Edwards | Category: Water Pump | Size: 1 MB

Table of Contents
5
Introduction
7
Scope and Definitions
7
Technical Data
9
General
9
Pumping Media
9
Vent Gas Specification and Vent Control Data
10
Vent Gas and Vent Control Data
10
Water-Cooling
11
Technical Data
12
Materials Exposed to Gases Pumped
15
Dimensions of the EXT 200/200H Split Flow Pump System (Units in MM)
15
Dimensions of the EXT 200/200H GCMS Split Flow Pump System (Units in MM)
16
Dimensions of the EXT 200/200H ICPMS Split Flow Pump System (Units in MM)
17
Dimensions of the EXT 200/200H GCMS/LCMS (Reversed Body)
18
Installation
19
Unpack and Inspect
19
Typical Installation
19
Connection to the Vacuum System
20
Typical Vacuum System Using a Turbomolecular Pump
20
Mechanical Fixing
21
List of Items Supplied
21
Inlet-Screens (Supplied Fitted) or Integral Mesh Centering Ring (Supplied Separate from the Pump)
22
Inlet Connection and Orientation
22
Correct Installation of Inlet Screen
22
Backing Connection
23
Mounting Attitude Range of an EXT Split Flow Pump
23
Interstage Connection (Hi Pump Variants Only)
24
Vent Options, Vent Valve Connection and Control
24
Electrical Installation
24
Vent-Restrictor Orifice Diameter (with Atmospheric Pressure at the Inlet of the Vent-Valve)
24
EXDC Controllers
25
EXC Controllers
25
Cooling
25
Introduction
25
Forced-Air Cooling
26
Water-Cooling
26
Operation
27
Start-Up
27
Shut-Down
27
Safety Interlocks and Control System
28
EXDC Controllers
28
EXC Controllers
28
Maintenance
29
Introduction
29
Bearing Maintenance
29
Rotor Life
29
Cleaning the Pump
30
Fault Finding
30
Fault Finding
31
Storage and Disposal
33
Storage
33
Disposal
33
Service, Spares and Accessories
35
Introduction
35
Service
35
Spares
35
ISX Inlet-Screens
35
Inlet-Strainer (Interstage Pumps Only)
36
Inlet-Flange Seals
36
Accessories
36
Installation
36
EXDC Drive Modules
36
EXC Controllers
36
Pump-To-Controller Cables
37
EXT Water Cooling Block Assembly
37
TAV Vent-Valve and Vent-Port Adaptor
37
ACX Air-Cooler
37
Pump-To-Controller Cable
37
VRX Vent-Restrictor
38
Installation of Optional Accessories
38
Index
39

Edwards EXT70/200H Instruction Manual (38 pages)

Split Flow Compound Turbomolecular Pumps

Brand: Edwards | Category: Water Pump | Size: 1 MB

Table of Contents
5
Introduction

7
- Scope and Definitions
  7
Technical Data

9
Installation

19
Operation

27
- Start-Up
  27
- Shut-Down
  27
- Safety Interlocks and Control System
  28
- EXDC Controllers
  28
- EXC Controllers
  28
Maintenance

29
- Introduction
  29
- Bearing Maintenance
  29
- Rotor Life
  29
- Cleaning the Pump
  30
- Fault Finding
  30
- Fault Finding
  31
Storage and Disposal

33
- Storage
  33
- Disposal
  33
Service, Spares and Accessories

35
- Introduction
  35
- Service
  35
- Spares
  35
- ISX Inlet Screens
  35
- Inlet Strainer (Interstage Pumps Only)
  36
- Inlet Flange Seals
  36
- Accessories
  36
- Installation
  36
- EXDC Drive Modules
  36
- EXC Controllers
  36
- Pump-To-Controller Cables
  37
- EXT Water Cooling Block Assembly
  37
- TAV Vent Valve and Vent Port Adaptor
  37
- ACX Air Cooler
  37
- Pump-To-Controller Cable
  37
- VRX Vent Restrictor
  38
- Installation of Optional Accessories
  38

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More Edwards Manuals

Edwards EXT70/200H Manuals

Edwards EXT70/200H Instruction Manual (40 pages)

Table of Contents

Edwards EXT70/200H Instruction Manual (38 pages)

Table of Contents

Introduction

Technical Data

Installation

Operation

Maintenance

Storage and Disposal

Service, Spares and Accessories

Related Products

Edwards Categories