Figure 2-12 Hv Output Cables Secured To Studs Inside Fps; Figure 2-13 Hv Conduit Bracket Properly Installed On Hv Feedthrough - ferrotec Temescal CV-12SLX User Manual

Section 2: Installation

Figure 2-12 HV Output Cables Secured to Studs inside FPS

Connecting the HV Ouput Cables and Conduit at the Source Tray
Connect the other end of the HV output cables to the HV feedthroughs in the source tray,
following the instructions provided below.
If you are installing a two-gun unit, make sure that the HV conduit/cable
connected to FPS #1 gets connected to the source designated as Source #1
and likewise for FPS #2 and Source #2.
If the vacuum system has previously been in use with a high-voltage power
supply, then before performing this procedure, touch the source tray and the
terminals on both HV feedthroughs with a properly connected grounding hook.

Figure 2-13 HV Conduit Bracket Properly Installed on HV Feedthrough

0101-8292-0, Rev. C
4 Replace the conduit panel, taking care to secure it in place with all
four screws.
CAUTION
CAUTION
Step Action
1 Remove the nut that secures one of the feedthroughs to the
underside of the source tray.
2 Install the HV conduit bracket (PN 0040-9982-0) supplied with the
unit and secure it with the nut removed in Step 1, as shown in
Figure 2-13.
2-13
2.6 Cable Installation
CV-12SLX User Manual