Cable Installation - ferrotec Temescal CV-12SLX User Manual

Section 2: Installation
2.5.5 Electron Beam Source Ground
To ensure a good ground between the electron beam source and the vacuum cubicle, the
following conditions must be met:
The base of the source and the surface on which it is mounted (usually the upper surface
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of the source tray) must be clean and free of evaporated material.
The mounting surface must be made of nonmagnetic material.
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The source must be securely bolted to the mounting surface.
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2.5.6 Mounting the Grounding Hook
If your are installing the CV-SLX unit in a system that does not already have a properly
mounted grounding hook, install the grounding hook provided with the power supply in the
vacuum cubicle, attaching its pigtail to the vacuum cubicle's central grounding point and the
grounding hook's storage bracket at a convenient location nearby.
2.6

Cable Installation

For an illustration of single-gun cabling details, see Quick Start Guide PN 0101-8300-0. For a
diagram of dual-gun cabling details, see Quick Start Guide PN 0101-8300-1. For detailed
instructions on connecting the cables shown in this diagram, see sections 2.6.1 through 2.6.5.
2.6.1 Connecting the Input Power Cables
Connecting the Power Module Input Power Cable
Make sure that the main power breaker on the HVPS front panel is in the OFF
position and remains in that position throughout the installation procedure.
On 208-V CV-12SLX units, the input power wiring must meet the following specifications:
50 A, 3-Phase delta, 4-conductors, each #6 AWG stranded UL1015 wire (Also consult local
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electrical codes.)
Wire the conductors in this cable into the input power terminal connector supplied with the
HVPS (see Figure 2-), so that the three hot wires will connect to rear panel receptacles L1,
L2, and L3 and the ground wire will connect to the receptacle marked as a ground (see
Figure 2-4). Then plug the terminal connector into the rear panel INPUT POWER receptacle.
0101-8292-0, Rev. C
CAUTION
2-9
2.6 Cable Installation
CV-12SLX User Manual