Ishikawa Diagram #11: Output Arcing Fault; Ishikawa Diagram #12: Overtemperature Fault - ferrotec Temescal CV-12SLX User Manual

5.3 Ishikawa Diagrams
Emitter/Chamber
Damaged emitter
HV Output cable
Power Supply
Temp Sensors
Connection J6 on inverter
not made or brokern
Ambient temperature too high
Power supply blower's
intake restricted
Power Supply
CV-12SLX User Manual

Ishikawa Diagram #11: Output Arcing Fault

Possible Causes
Faulty/loose connections in
HV path or output path
HV feedthrough
shorted/damaged
Faulty/loose connections in FPS
connections or chamber feedthrough

Ishikawa Diagram #12: Overtemperature Fault

Possible Causes
U1 damaged
Defective B1 blower fan
B1 blower fan power connection
missing or damaged
B1 blower fan obstructed
Defective HV Relay
FPS
+24 VDC missing;
PS1 or T2 defective
Connections between inverter
and T2/PS1 missing or defective
B1 Blower Fan
5-12
Section 5: Troubleshooting
Consequence
Output Arcing LED lights
red (see Table 6-16)
Consequence
Overtemperature LED
lights red
(see Table 6-18)
0101-8292-0, Rev. C