ferrotec Temescal CV-12SLX User Manual page 33

Section 2: Installation
Table 2-1 Descriptions of I/Os Exchanged via HVPS Rear Panel
Signal Name
KV SET IN
ANALOG COMMON
KV MONITOR OUT
mA MONITOR OUT
REMOTE/LOCAL IN
I/O SWITCHES POWER
DIGITAL COMMON
HV ON IN +
HV ON IN –
RESET +
RESET –
HV IS ON INDICATOR
POWER SUPPLY FAULT
INDICATOR
HV READY INDICATOR
OUT OF REGULATION
INDICATOR
INTERLOCK OK INDICATOR
HV OFF IN+
HV OFF IN–
REMOTE INTERLOCKS IN
REMOTE INTERLOCKS OUT
0101-8292-0, Rev. C
Connector J4 and the HVPS I/O Cable (PN 0620-6682-0)
Pin I/O Type Description
1 Analog HV adjustment input, 0-10 V dc = 0-10 KV. Controls high voltage if Pin 5 is high, in
input which case the HVPS front panel OUTPUT kV ADJUST pot is disabled.
2 Analog Common for KV MONITOR OUT and mA MONITOR OUT outputs (see Pins 3 and 4), if
common used. Connect to vacuum system ground.
3 Analog High voltage monitor output, linear (0-10 V dc = 0-10 kV).
output
4 Analog Emission current monitor output., linear. Scaling is factory set (0-10 V dc = 0-1500 mA).
output
5 Digital Selects either remote or local HV control. If high, (i.e., if +24 V dc is supplied), then 0-
input 10 dc input via Pin 1 controls HV exclusively. If low, then HVPS front panel OUTPUT kV
ADJUST pot exclusively controls the high voltage.
6 DC voltage + 24 V dc output, fused at 1 A. Can be used to supply Pin 5, if remote HV control via
Pin 1 is desired. NOTE: To be used only for power supply control; do NOT use this
voltage to drive any external device.
7 Digital Common for digital indicator signals output via Pins 12, 13, 14, 15, and 16, if any of
common them are used.
8 Digital Controlled by a normally open external switch. If HV OFF IN + is high, then a
input momentary contact closure between Pins 8 and 9 switches the high voltage ON.
9 DC voltage + 15 dc output supplied to Pin 8 via a normally open switch.
10 Digital Controlled by a normally open external switch. If the POWER SUPPLY FAULT
input INDICATOR output (Pin 13) is true, then a momentary contact closure between Pins 10
and 11 resets the HVPS.
11 DC voltage + 24 dc output supplied Pin 10 via a normally open switch controlling.
12 Digital When high (+24 V dc), this output indicates that the high voltage is ON.
output
13 Digital When high, this output indicates that a latching power supply fault has occurred. For
output additional details about latching PS faults, see section 5.2.
14 Digital When high, this output indicates that the HV can be switched on. This indicator is high
output when the HV OFF IN+ input supplied via Pin 17 is high.
15 Digital High whenever the HVPS front panel HV OUT OF REGULATION LED is lit. For additional
output details about that LED, see section 5.2.
16 Digital High when all interlocks are made, so that the REMOTE INTERLOCK IN input (Pin 24) is
output high.
17 Digital Controlled by a normally closed external switch. This input is high when the HV is OFF
input and when no latching power supply faults exist. When the HV is ON, then momentary
opening of the external contact closure between Pins 17 and 18 switches off the HV.
18 DC voltage + 15 dc output supplied to Pin 17 via a normally closed switch.
24 Digital High when the external interlock string is made; connect to Pin 24 via external interlock
input switches.
25 DC voltage + 24 dc output, fused at 0.2 A and supplied to Pin 24 via external interlock switches.
NOTE: Minimum external interlocks required are WATER (= e-beam gun's water-flow
switch is true), DOORS (= all vacuum cubicle doors are closed), and VACUUM (=
vacuum system is pumped down to crossover point). If e-beam position is controlled by
a beam sweep controller, a POSITION interlock signal from that component must also
be true. NOTE: Within the HVPS, the external interlock string is connected in series with
the internal interlocks for the HVPS and FPS covers.
2-17
2.6 Cable Installation
CV-12SLX User Manual