Figure 2-3 System Low Impedance Grounding Requirements - ferrotec Temescal CV-12SLX User Manual

2.5 Grounding Requirements
2.5.2 System Low-Impedance Grounding
Within the vacuum system, the low-impedance ground is provided by 3"-wide and 1/2"-wide
copper straps. As Figure 2-3 shows, these straps must connect:
the grounding stud labeled RF GND on the power module's rear panel (see Figure 2-4) to a
•
grounding point on the frame of the operator station
the operator station's grounding point to the vacuum cubicle's central grounding point
•
the grounding stud labeled RF GND on the FPS front panel (see Figure 2-) to the vacuum
•
cubicle's main grounding point
the source tray to the vacuum cubicle's main grounding point.
•
Figure 2-3 shows the low-impedance ground connections for a single-gun system. Low-
impedance ground connections are identical on two-gun units, except that an additional
length of ½"-wide copper strap must connect the system's central grounding point to FPS #2.
For an additional diagram relating to low-impedance grounding, see either document 0101-
8300-0, the Quick Start Guide for single-gun CV-12SLX units, or document 0101-8300-1, the
Quick Start Guide for dual-gun units.

Figure 2-3 System Low Impedance Grounding Requirements

2.5.3 Power Module Grounding
Make connections to the power supply's grounding lugs as shown in the Quick Start Guides for
the CV-12SLX, following the procedure described below.
CV-12SLX User Manual 2-6
Section 2: Installation
0101-8292-0, Rev. C