Table 5-15 Hvps Setpoint Overvoltage Led Lights Red; Table 5-16 Hvps Output Arcing Led Lights Red - ferrotec Temescal CV-12SLX User Manual

Section 5: Troubleshooting
Before performing the following procedure, perform the procedure described in
section 5.4.1.

Table 5-15 HVPS SETPOINT OVERVOLTAGE LED lights red

Condition indicated: HV output voltage is above 10.5 kV when setpoint is 10 kV
Symptoms
TCS displays PSU1_FAIL_ALM (= Power Supply Control Is On failure alarm)
•
HVPS Front Panel: SETPOINT OVERVOLTAGE and POWER SUPPLY FAULT LEDs are lit
•
EBC: Fault LED lit in High Voltage section of Diagnostics screen
•
For additional information about this fault mode, see Ishikawa Diagram #10 in Appendix A.
Possible Cause
1. Fault condition(s) whose investigation
requires removal of HVPS top cover
Condition indicated: Latched PS fault due to either an arc duration > 120 ms or arc rate > 200 Hz
Symptoms
TCS issues PSU1_FAIL_ALM (= Power Supply Control Is On failure alarm)
•
HVPS Front Panel: OUTPUT ARCING and POWER SUPPLY FAULT LEDs are lit
•
EBC: Fault LED lit in High Voltage section of Diagnostics screen
•
For additional information about this fault mode, see Ishikawa Diagram #11.
Possible Cause
1. Faulty or loose connections.
2. Emitter damaged
3. System improperly grounded
for HV.
4. Chamber Pressure too high
5. HV feedthrough shorted
6. Fault condition(s) whose
investigation requires checking
HV output at FPS.
0101-8292-0, Rev. C
DANGER: HIGH VOLTAGE
1. Contact Temescal Field Service.

Table 5-16 HVPS OUTPUT ARCING LED lights red

1. Make sure that all HV and FPS connections are correctly and securely made.
2. Follow instructions in gun manual to troubleshoot emitter issues.
3. Make sure that grounding instructions in e-gun manual have been correctly
implemented.
4. Chamber pressure should be less than 1 x 10
5. Check copper bus bars and HV feedthroughs for shorts, coatings, cracks or arc
marks.
6. Contact Temescal Field Service.
Procedure
Procedure
-5
5-25
5.4 Troubleshooting Procedures
mTorr.
CV-12SLX User Manual