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ferrotec Temescal CV-6SLX User Manual

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0101-8242-0
CV-6SLX USER MANUAL
Revision C, April 2016
Temescal, a division of Ferrotec (USA) Corporation
4569-C Las Positas Road, Livermore, CA 94551
Tel: 1-800-522-1215; Fax: 925-449-4096

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  • Page 1 0101-8242-0 CV-6SLX USER MANUAL Revision C, April 2016 Temescal, a division of Ferrotec (USA) Corporation 4569-C Las Positas Road, Livermore, CA 94551 Tel: 1-800-522-1215; Fax: 925-449-4096...
  • Page 2 Deleted former section 5.6 (Suggested Spare Parts lists). Replaced all occurrences of 0620-9654-0 with Pursuant to PN change ordered in April 0620-9654-1 and all occurrences of 6024- ECN 12185. 2016 6112-1 with 0620-8684-1. © 2016 Ferrotec (USA) Corporation TemEBeam is a trademark of Ferrotec Corporation.

  • Page 3: Table Of Contents

    Table of Contents Page Section Number and Title Number Introduction to the CV-6SLX ..................1-1 1.1 Product Description ....................... 1-1 1.2 CV-6SLX HVPS Description and Specifications ..............1-1 1.3 Filament Power Supply Description and Specifications ............. 1-2 1.4 Miscellaneous Hardware and Interconnection Cables ............1-3 1.5 TemEBeam EBC Integrated Controller ................
  • Page 4 CV-6SLX User Manual 0101-8242-0, Rev. C...
  • Page 5 List of Illustrations Figure Number and Title Page Figure 1-1 CV-6SLX HVPS Front Panel ......................... 1-1 Figure 1-2 Filament Power Supply Front Panel ......................1-2 Figure 1-3 EBC Main Control Unit and Hand-Held Controller ..................1-3 Figure 2-1 Mounting Hole Pattern for FPS Module(s) ....................2-3 Figure 2-2 Facility Low Impedance Grounding Requirements ..................
  • Page 6 List of Illustrations (Continuted) Figure Number and Title Page Ishikawa Diagram #1: No Input Power ......................... 5-7 Ishikawa Diagram #2: Interlock Fault ........................... 5-7 Ishikawa Diagram #3: No Beam After HV and Gun Are Switched ON ................5-8 Ishikawa Diagram #4: HV Output Unstable ........................5-8 HV Out of Regulation Ishikawa Diagram #5: LED Lights Frequently .................
  • Page 7 Terms and Conditions 1. Delivery. Unless otherwise stated, shipments of Ferrotec Temescal Electron Beam Gun and Systems products quoted and/or produced at the Livermore, CA factory site will be made Ex-Works, Livermore, CA Incoterms. Shipping date as are approximate and are based on conditions at the time of acceptance and prompt receipt of all necessary information from the Buyer.
  • Page 8 FERROTEC (USA) CORPORATION’S ACCEPTANCE OF THE REFERENCED PURCHASE ORDER IS EXPRESSLY MADE CONDITIONAL ON THE PARTY’S ASSENT (WHO SUBMITTED THE REFERENCED PURCHASE ORDER) TO FERROTEC’S ADDITIONAL OR DIFFERENT TERMS IN THIS ORDER ACKNOWLEDGEMENT. IF NO ANSWER IS RECEIVED FROM THE PARTY SUBMITTING THE REFERENCED PURCHASE ORDER WITHIN A REASONABLE TIME AFTER RECEIPT OF THIS ORDER ACKNOWLEDGEMENT, IT WILL BE ASSUMED THAT THEIR INCLUSION HAS BEEN ASSENTED TO.
  • Page 9 HERIN. THE TERM OF ANY WARRANTY OR WARRANTOR IMPLIED BY LAW SHALL END ON THE TERMINATION DATE OF THIS LIMITED WARRANTY SPECIFIED IN SECTION 2. B. Warranty duration for out of warranty items repaired by Ferrotec shall be ninety (90) days from date of shipment post repair “Ex-works”.
  • Page 10 Safety Instructions for Operating and Service Personnel Operators and service personnel should always wear safety glasses. Operators shall not enter areas intended for service access only. Only experienced service personnel should enter such areas, and only after taking the preliminary precautions described in paragraphs 1 through 6 below.
  • Page 11 Temescal, Livermore, CA, a division of Ferrotec (USA) Corp. The equipment, or any of its parts, shall not be altered without the prior written approval of Temescal. The user and/or purchaser of this equipment shall have the sole responsibility for any malfunction which results from improper use, faulty maintenance, damage, improper repair, or alteration by any party other than Temescal.
  • Page 12 Guidelines And Good Practices 1. Follow applicable clean room procedures (smocks, masks, gloves, etc.). 2. Do not expose the vent and purge valves to excessive pressures. The nitrogen line regulator is factory set at 15 psi and must not be adjusted above 20 psi. 3.

  • Page 13: Introduction To The Cv-6Slx

    1 Introduction to the CV-6SLX Product Description The Temescal Model CV-6SLX is a 6-kW, constant voltage, high-frequency, switching electron beam power supply. The CV-6SLX is compatible with sources featuring either permanent-magnet or electromagnetic deflection. The power supply delivers up to 10 kV at 600 mA, making it possible to achieve substantial deposition rates in production environments.

  • Page 14: Filament Power Supply Description And Specifications

    1.3 Filament Power Supply Description and Specifications Section 1: Introduction to the CV-6SLX HVPS Specifications Dimensions 8.75 in. H × 19 in. W × 23 in. D Weight: 61 lbs. Input Power 208-V Model CV-6SLX 208 V ac +10% /–5%, 50/60 Hz, 27 A, 60 Hz 3-phase delta (4-wire) 400-V Model CV-6SLX 400 V ac +10% /–5%, 50/60 Hz, 15 A, 50 Hz...

  • Page 15: Miscellaneous Hardware And Interconnection Cables

    Section 1: Introduction to the CV-6SLX 1.5 Miscellaneous Hardware and Interconnection Cables For FPS installation instructions, see section 2.4. For a description of the switches and LEDs on the FPS front panel, see section 3.3. FPS Specifications Dimensions: 6.5 in. H × 6.5 in. W × 11 in. D Weight: 14 lbs.
  • Page 16 1.5 TemEBeam Controller (EBC) Section 1: Introduction to the CV-6SLX CV-6SLX User Manual 0101-8242-0, Rev. C...

  • Page 17: Installation

    Installation Section Overview This section describes the procedures required for installation the CV-6SLX power supply. The topics covered are: Section 2.2 List of Components and Cables Supplied with the Unit Section 2.3 Rack Mounting the Power Module (HVPS) Section 2.4 Mounting the Filament Power Supply Module(s) Section 2.5 Grounding Requirements Section 2.6 Cable Installation Section 2.6.1 Connecting the Input Power Cables...

  • Page 18: List Of Components And Cables Supplied With The Unit

    2.2 List of Components and Cables Supplied with the Unit Section 2: Installation List of Components and Cables Supplied with the Unit Listed below are the components and cables supplied with CV-6SLX units. CV-6SLX HVPS, PN 0620-1135-0 (for 208-volt units) or 0620-1135-1 (for 400-volt units) •...

  • Page 19: Mounting The Filament Power Supply Module(S)

    Section 2: Installation 2.4 Mounting the Filament Power Supply Module(s) maintained through the cabinet and keep the ambient air temperature at the input to the power supply below 104° F (40° C). All air passages must be unobstructed. If air filters are used on the cabinet air input, they should be checked on a regular schedule for dirt and dust accumulation.

  • Page 20: Figure 2-2 Facility Low Impedance Grounding Requirements

    2.5 Grounding Requirements Section 2: Installation Figure 2-2 Facility Low Impedance Grounding Requirements The installation of twin rods of copper-clad steel is preferred. However, if the equipment is to be installed on the upper floors of a building, the system can be grounded by connecting the vacuum chamber to the steel structure of the building.

  • Page 21: Figure 2-3 System Low Impedance Grounding Requirements

    Section 2: Installation 2.5 Grounding Requirements 2.5.2 System Low-Impedance Grounding Within the vacuum system, the low-impedance ground is provided by 3”-wide and 1/2”-wide copper straps. As Figure 2-3 shows, these straps must connect: the grounding stud labeled RF GND on the power module’s rear panel (see Figure 2-4) to a •...

  • Page 22: Figure 2-4 Rear Panel Of Cv-6Slx Hvps

    2.5 Grounding Requirements Section 2: Installation Secure one end of this strap to the grounding stud labeled RF GND on the power module’s rear panel (see Figure 2-4). Figure 2-4 Rear Panel of CV-6SLX HVPS Secure a length of #10 AWG wire to the grounding lug labeled GND on the power module rear panel.

  • Page 23: Cable Installation

    Section 2: Installation 2.6 Cable Installation Figure 2-5 Grounding Studs on FPS Front Panel RF Ground. Connect to vacuum cubicle’s central gounding point, using 1/2”-wide copper strap (PN 5621-0032-0). Chassis Ground. Connect to vacuum cubicle’s central gounding point, using #10 AWG wire. Secure a length of #10 AWG wire to the other grounding lug on the FPS front panel.

  • Page 24: Figure 2-6 Input Power Connections To 208-Volt Hvps Units

    2.6 Cable Installation Section 2: Installation 2.6.1 Connecting the Input Power Cables Connecting the Power Module Input Power Cable CAUTION Make sure that the main power breaker on the HVPS front panel is in the OFF position and remains in that position throughout the installation procedure. The CV-6SLX is available for the following input voltages: 208-V Model CV-6SLX (PN 6024-7110-0), 50/60 Hz, 3-Phase delta, 4-wire •...

  • Page 25: Figure 2-8 Input Power And Hv Connections On Fps Front Panel

    Section 2: Installation 2.6 Cable Installation Connecting the FPS Input Power Cable(s) (PN 6622-0100-20) An FPS power cable (PN 6622-0100-20) is provided for each FPS. Plug one end of this cable into HVPS rear panel connector J1 (see Figure 2-4) and the other end into the power receptacle on the FPS front panel (see Figure Figure 2-8).

  • Page 26: Figure 2-9 Removing The Fps Conduit Panel

    2.6 Cable Installation Section 2: Installation Step Action Remove four screws that secure the conduit panel to the FPS rear panel, as shown below. Figure 2-9 Removing the FPS Conduit Panel Insert the threaded end of the conduit elbow into the hole in the conduit panel and secure the elbow with the nut provided, as shown in Figure 2-10.

  • Page 27: Figure 2-12 Hv Conduit Bracket Properly Installed On Hv Feedthrough

    Section 2: Installation 2.6 Cable Installation Replace the conduit panel, taking care to secure it in place with all four screws. Connecting the HV Ouput Cables and Conduit at the Source Tray Connect the other end of the HV output cables to the HV feedthroughs in the source tray, following the instructions provided below.

  • Page 28: Figure 2-14 Control/Data Cable Connections On Fps Front Panel

    2.6 Cable Installation Section 2: Installation Secure the lugs on the ends of the HV cables to the feedthroughs, as shown in Figure 2-12. Either cable can be connected to either feedthrough, as polarity is not an issue. 2.6.4 Connecting the Control/Data Cables This section provides detailed instructions for connecting the unit’s control/data cables: the HVPS-FPS cable, PN 0620-6672-0 •...
  • Page 29 Section 2: Installation 2.6 Cable Installation 2.6.5 Making I/O Connections to the Vacuum System NOTE Before performing this portion of the installation, complete the mandatory baseline test described in Section III of document 0101-8241-1, the CV-6SLX Quick Start Guide. The installer must make connections (1) between the vacuum system and the HVPS I/O cable (PN 0620-6682-0) and (2) between the vacuum system and the FPS I/O cable (PN 0620-6672- 2).

  • Page 30: Figure 2-15 System I/Os Exchanged Via Hvps Rear Panel Connector J4 And The Hvps I/O Cable (Pn 0620-6682-0)

    2.6 Cable Installation Section 2: Installation Figure 2-15 System I/Os Exchanged via HVPS Rear Panel Connector J4 and the HVPS I/O Cable (PN 0620-6682-0) NOTE Because the interlock string is internally supplied with 24 V dc, only contact closure must be supplied by the vacuum system.
  • Page 31 Section 2: Installation 2.6 Cable Installation Table 2-1 Descriptions of I/Os Exchanged via HVPS Rear Panel Connector J4 and the HVPS I/O Cable (PN 0620-6682-0) Signal Name Pin I/O Type Description KV SET IN Analog HV adjustment input, 0-10 V dc = 0-10 KV. Controls high voltage if Pin 5 is high, in input which case the HVPS front panel OUTPUT kV ADJUST pot is disabled.

  • Page 32: Figure 2-16 System I/Os Exchanged Via Fps Front Panel Connector J101 And The Fps I/O Cable (Pn 0620-6672-2)

    2.6 Cable Installation Section 2: Installation Figure 2-16 System I/Os Exchanged via FPS Front Panel Connector J101 and the FPS I/O Cable (PN 0620-6672-2) NOTE: DEPOSITION CONTROLLER INPUT On the CV-6SLX power supply, the polarity of the emission current request input (J101 Pin 10) must be positive.
  • Page 33 Section 2: Installation 2.6 Cable Installation Table 2-2 Descriptions of I/Os Exchanged via FPS Rear Panel Connector J101 and the FPS I/O Cable (PN 0620-6672-2) Signal Name I/O Type Description CONTROL POWER COMMON Common for +24 V dc return for the following digital outputs: GUN FILAMENT OK (Pin 4), digital outputs GUN READY INDICATOR (Pin 7), and GUN IS ON INDICATOR (Pin 14).
  • Page 34 2.6 Cable Installation Section 2: Installation CV-6SLX User Manual 2-18 0101-8242-0, Rev. C...

  • Page 35: Power Supply Operation

    Power Supply Operation Section Overview This section covers the following topics: Section 3.2 HVPS Front Panel Controls and Indicators Section 3.3 Switches and LEDs on the FPS Front Panel Section 3.4 Power-Up Procedure Section 3.5 Control of Power Supply from TemEBeam EBC Integrated Controller Section 3.6 Control of Power Supply by a PLC-Based System Controller Section 3.7 Responding to Latching Power Supply Faults HVPS Front Panel Controls and Indicators...

  • Page 36: Switches And Leds On The Fps Front Panel

    3.3 Switches and LEDs on the FPS Front Panel Section 3: Power Supply Operation 3.2.2 HVPS Front Panel Indicators Display Meters Output Voltage meter (0–10 kV) • Emission Current meter (0–600 mA) • Status LEDs Power ON LED. Turns green to indicate that the HVPS is powered up. •...

  • Page 37: Power-Up Procedure

    Section 3: Power Supply Operation 3.4 Power-Up Procedure HIGH VOLTAGE ON LED: Lights when the HV IS ON signal from the HVPS is high. • EMISSION CURRENT SELECTION SWITCH: Position of this switch determines scaling of • remote emission current request inputs and monitoring outputs. A black plastic cap normally covers this switch, which is factory set and should require no further attention.

  • Page 38: Figure 3-3 Ebc's Operations>E-Beam Screen When Beam Is Off

    3.5 Control of Power Supply from TemEBeam EBC Integrated Controller Section 3: Power Supply Operation Figure 3-3 EBC’s Operations>E-Beam Screen when Beam Is Off 3.5.2 Using the E-BEAM ON/OFF Button to Switch the Beam On/Off As noted above, when the beam is off you can switch it on by simply touching the E-BEAM button, assuming that you have already entered a nonzero percent-power setpoint.

  • Page 39: Figure 3-5 Operations>E-Beam Screen When Gun Is On And Hv Is Off

    Section 3: Power Supply Operation 3.5 Control of Power Supply from TemEBeam EBC Integrated Controller Figure 3-5 Operations>E-Beam Screen when Gun is On and HV is Off 3.5.4 Setting the Beam Power Level To set the beam power level, first touch the Change button, then touch the E-Beam button. The EBC will then display a keypad screen, which you can use to enter a percent-power setpoint.

  • Page 40: Figure 3-7 Operations>E-Beam Screen, Beam On At 5% Power

    3.5 Control of Power Supply from TemEBeam EBC Integrated Controller Section 3: Power Supply Operation Figure 3-7 Operations>E-Beam Screen, Beam on at 5% Power 3.5.5 Changing the HV Operating Level If kV Control is set to Input Ctrl on the EBC’s Config>E-Beam screen, you can change the operating voltage of the HVPS at any time, regardless of whether the HV is on or off.
  • Page 41 Section 3: Power Supply Operation 3.5 Control of Power Supply from TemEBeam EBC Integrated Controller Functional Definitions of PS-Related LED Indicators on the Diagnostics Screen Except where noted, the indicators on this screen are gray (off) when the signal in question is false and green when it is true.

  • Page 42: Control Of Power Supply By A Plc-Based System Controller

    3.6 Control of Power Supply by a PLC-Based System Controller Section 3: Power Supply Operation Figure 3-9 Remote Controller’s LOCAL Screen, Menu 1 Selected, Beam and Sweep Off Press to switch beam On/Off Press to select beam power control as the joystick’s function Joystick.

  • Page 43: Figure 3-10 Hvps Front Panel Leds: Hvps Powered Up In Nominal State, With Hv And Fps Off

    Section 3: Power Supply Operation 3.6 Control of Power Supply by a PLC-Based System Controller NOTE The main power breaker on the power module front panel controls power to the filament power supply (FPS) module. Figure 3-10 shows the HVPS front panel LEDs when the unit is powered up and in its nominal state (i.e., no faults have occurred) but before the HV and the FPS have been switched on.
  • Page 44 3.6 Control of Power Supply by a PLC-Based System Controller Section 3: Power Supply Operation 2. Assuming that the reset attempt is successful, the HV can then be switched on again. On units without a remote controller, the HV ON contact must be supplied via Pins 8 and 9 of HVPS rear panel connector J4 (see Table 2-1).

  • Page 45: Responding To Fault Conditions

    Section 3: Power Supply Operation 3.7 Responding to Fault Conditions 3.6.4 Adjusting the Filament Bias Current and the Emission Current Adjusting the Filament Bias Current The bias current can be adjusted only by varying the FILAMENT CURRENT REQUEST signal, which is supplied Pin 12 on the FPS front panel connector J101 (see Table 2-2). NOTE When the FIL BIAS SET SELECT signal (supplied via J101 Pin 5) is low, the Autobias circuit of the FPS controls the bias current.

  • Page 46: Figure 3-11 Hvps Front Panel Leds When Subthreshold Arcing Is Occurring

    3.7 Responding to Fault Conditions Section 3: Power Supply Operation Figure 3-11 HVPS Front Panel LEDs when Subthreshold Arcing is Occurring If arcing surpasses either a frequency or a time-duration threshold, a latching OUTPUT ARCING fault will occur. (These threshold values are detailed in Figure 5-8.) The OUTPUT ARCING and POWER SUPPLY FAULT LEDs will then light red, while the HV OUT OF REGULATION LED will turn green and the ART/OUT OF REGULATION LED will no longer flash.

  • Page 47: Theory Of Operation

    Theory of Operation Section Overview This section provides separate theories of operations for the major modules of the CV-6SLX power supply. Section 4.2 contains a theory of operation for the power module (i.e., HVPS) and section 4.3 covers the FPS in detail. Power Module Theory of Operation 4.2.1 Input Power Filtering, Protection, and Distribution AC line power is connected to the power module through the green connectors below AC Input...
  • Page 48 4.2 Power Module Theory of Operation Section 4: Theory of Operation Figure 4-2 CV-6SLX HVPS Internal Components Referenced in Section 4.2 Front Panel Board HV Regulator Board Circuit Breaker CB1 PS1: 24 V dc Power Supply HV Output Transformer HV Inverter Board HV Output Board Line Filter LF1 Step-Down...
  • Page 49 Section 4: Theory of Operation 4.2 Power Module Theory of Operation Two AC line phases from the Inverter board feed the primary of step-down transformer T2 (see Figure 4-2). In 208 VAC units, T2 is wired with jumpers for a 1:1 ratio. In 400 VAC units, it is wired for a 2:1 ratio.

  • Page 50: Fps Theory Of Operation

    4.3 FPS Theory of Operation Section 4: Theory of Operation HV Output Board The HV Output board provides secondary-tuning capacitance, HV rectification, and voltage and current feedback to the Regulator board. High frequency AC voltage driven on the primary of the HV transformer by the Inverter is transformed by a fixed ratio (15:225) and connected to the input of the HV Output board at J1 and J2.

  • Page 51: Figure 4-3 Filament Power Supply (Fps) Module

    Section 4: Theory of Operation 4.3 FPS Theory of Operation Figure 4-3 Filament Power Supply (FPS) Module Figures 4-4 and 4-6 show the locations of the major components in the standard FPS unit (i.e., with PN 0620-6604-0) and for FPS units with PN 0620-6604-2, respectively. Figures 4-5 and 4-7 are top-level block diagrams for the same units.

  • Page 52: Figure 4-4 Component Location In Standard Fps Units (Pn 0620-6604-0)

    4.3 FPS Theory of Operation Section 4: Theory of Operation Figure 4-4 Component Location in Standard FPS Units (PN 0620-6604-0) Figure 4-5 Top Level Block Diagram for Standard FPS Units (PN 0620-6604-0) CV-6SLX User Manual 0101-8242-0, Rev. C...

  • Page 53: Figure 4-6 Component Location In Fps Units With Pn 0620-6604-2

    Section 4: Theory of Operation 4.3 FPS Theory of Operation Figure 4-6 Component Location in FPS Units with PN 0620-6604-2 Figure 4-7 Top Level Block Diagram for FPS Units with PN 0620-6604-2 0101-8242-0, Rev. C CV-6SLX User Manual...

  • Page 54: Figure 4-8 Filament Supply Pcb Overview Block Diagram

    4.3 FPS Theory of Operation Section 4: Theory of Operation 4.3.3 Filament Supply PCB Figure 4-8 is a top-level block diagram for the Filament Supply PCB, whose circuits are described in detail below. Figure 4-8 Filament Supply PCB Overview Block Diagram Filament Filament 208 -220...
  • Page 55 Section 4: Theory of Operation 4.3 FPS Theory of Operation Filament Switch Mode Supply The filament supply uses IGBT switches and operates at a frequency of approximately 28.5 kHz. The filament transformer steps down the voltage with a ratio of 10:1 to provide approximately 10 V rms at the filament.

  • Page 56: Figure 4-9 Block Diagram Of Filament Supply Pcb Control And Power Circuits

    4.3 FPS Theory of Operation Section 4: Theory of Operation Figure 4-9 Block Diagram of Filament Supply PCB Control and Power Circuits HV OFF + Gun OFF Auto Bias Circuit Auto Bias Enable Fil Curr Filament Current Auto Bias Request Select Filament Current...

  • Page 57: Figure 4-10 Emission Current Ramp Circuit

    Section 4: Theory of Operation 4.3 FPS Theory of Operation Figure 4-10 Emission Current Ramp Circuit Emission Buffer Emission Request Signal Request Clock 8 Bit To emission current 8 Bit Buffer loop compensation summing junction Counter Remove Clear Clock Stop Enable Auto Bias Circuit Figure 4-11 shows the Auto Bias circuit, which is designed to maintain the filament current at a...
  • Page 58 4.3 FPS Theory of Operation Section 4: Theory of Operation 4.3.4 Filament Output Section The filament output section of the FPS connects the filament power with the negative HV. The filament power and the HV are connected to the filament by a two-conductor cable. The high voltage (0–10 kV) from the HV Power Supply enters the FPS via J301.

  • Page 59: Troubleshooting

    Troubleshooting Section Overview This section provides a guide to basic troubleshooting procedures. The topics covered are: Section 5.2 HVPS Front Panel LEDs Section 5.2.1 Status Indicator LEDs Section 5.2.2 LEDs That Indicate Nonlatching Faults Section 5.2.3 LEDs That Indicate Latching Faults Section 5.3 Ishikawa Diagrams Section 5.4 Troubleshooting Procedures Section 5.4.1 Checkout of HV Circuit and Cable Connections...

  • Page 60: Figure 5-1 Hvps Front Panel Leds

    5.2 HVPS Front Panel LEDs Section 5: Troubleshooting Figure 5-1 HVPS Front Panel LEDs 5.2.1 Status Indicator LEDs Figure 5-2 points out and describes the three status indicator LEDs. Figure 5-2 Status Indicator LEDs HV ON LED When unit is powered up but HV •...

  • Page 61: Figure 5-3 Sub-Threshold Arcing: Arc/Out Of Regulation And Output Arcing Leds

    Section 5: Troubleshooting 5.2 HVPS Front Panel LEDs Figure 5-3 Sub-Threshold Arcing: Arc/Out Of Regulation and Output Arcing LEDs Arc/Out of Regulation LED LED is normally off (i.e., clear) • Flashes yellow when subthreshold • arcing occurs and when the HV is out of regulation HV Out of Regulation LED LED is normally green...

  • Page 62: Figure 5-5 Hvps Front Panel Leds With Latching Fault Leds Outlined

    5.2 HVPS Front Panel LEDs Section 5: Troubleshooting faults. Those LEDs are outlined in Figure 5-5. Figure 5-5 HVPS Front Panel LEDs with Latching Fault LEDs Outlined Figure 5-6 Interlocks OK and Rail Undervoltage LEDs Interlocks OK LED Turns red one or more interlocks •...

  • Page 63: Figure 5-7 Hv Overcurrent And Hv Overvoltage Leds

    Section 5: Troubleshooting 5.2 HVPS Front Panel LEDs Figure 5-7 HV Overcurrent and HV Overvoltage LEDs HV Overcurrent LED LED turns red if output current is • more than 105% (630 mA– 636 mA) of maximum output current (600 mA) HV Overvoltage LED LED turns red if HV output •...

  • Page 64: Figure 5-10 Aux Supply Low And External Control Fault Leds

    5.3 Ishikawa Diagrams Section 5: Troubleshooting Figure 5-10 Aux Supply Low and External Control Fault LEDs Aux Supply Low LED LED turns red when the nominal • +24 VDC control voltage drops below +19.5 VDC External Control Fault LED LED lights red: (a) when fault •...

  • Page 65: Ishikawa Diagrams

    Section 5: Troubleshooting 5.3 Ishikawa Diagrams Ishikawa Diagram #1: No Input Power Consequence Possible Causes Mains Incorrect mains supply voltage Phase missing No input power (see Table 6-1) 5-1) Missing/loose internal Contactor defective, cable connections not pulling in A3 HV Regulator PCB defective Power Supply Ishikawa Diagram #2: Interlock Fault...

  • Page 66: Ishikawa Diagram #3: No Beam After Hv And Gun Are Switched On

    5.3 Ishikawa Diagrams Section 5: Troubleshooting Ishikawa Diagram #3: No Beam After HV and Gun Are Switched ON Consequence Possible Causes Emitter Loose or faulty connections in emitter assembly, feedthrough, or interconnection path Filament failure HV not present at emitter Emitter incorrectly assembled HV and gun switched ON but no beam is emitted...

  • Page 67: Ishikawa Diagram #5: Hv Out Of Regulation Led Lights Frequently

    Section 5: Troubleshooting 5.3 Ishikawa Diagrams Ishikawa Diagram #5: HV Out of Regulation LED Lights Frequently Consequence Possible Causes Emitter Dirty/loose connections Emitter damaged HV Out of Regulation LED lights frequently (see Table 6-11) 5-11) Shorts/loose connections on HV feedthrough(s) or HV connection path HV Path Ishikawa Diagram #6: Arc/Out of Regulation LED Lights Excessively for the Material/Application Consequence...

  • Page 68: Ishikawa Diagram #7: Rail Undervoltage Fault

    5.3 Ishikawa Diagrams Section 5: Troubleshooting Ishikawa Diagram #7: Rail Undervoltage Fault Consequence Possible Causes Power Supply R1 misadjusted on A3 HV Regulator PCB. TP85 to ref: 208 V = 2.2 VDC Rail low: 400 V = 4.27 VDC Min. for 208 VAC = 220 VDC Min.

  • Page 69: Ishikawa Diagram #9: Hv Overvoltage Fault

    Section 5: Troubleshooting 5.3 Ishikawa Diagrams Ishikawa Diagram #9: HV Overvoltage Fault Consequence Possible Causes Other HV relay control voltage missing. J103 pin 6 = +24 VDC Emitter damaged HV relay defective Loose cables HV Overvoltage LED lights red (see Table 6-14) 5-14) Defective feedback interconnection cable from A2 HV Output PCB to A3...

  • Page 70: Ishikawa Diagram #11: Output Arcing Fault

    5.3 Ishikawa Diagrams Section 5: Troubleshooting Ishikawa Diagram #11: Output Arcing Fault Consequence Possible Causes Emitter/Chamber Faulty/loose connections in HV path or output path Damaged emitter HV feedthrough shorted/damaged Output Arcing LED lights red (see Table 6-16) 5-16) Faulty/loose connections in FPS HV Output cable connections or chamber feedthrough Defective HV Relay...

  • Page 71: Ishikawa Diagram #13: Aux Power Supply Low Fault

    Section 5: Troubleshooting 5.3 Ishikawa Diagrams Ishikawa Diagram #13: Aux Power Supply Low Fault Consequence Possible Causes Mains HV Inverter PCB defective A3 HV Regulator PCB defective Aux Power Supply Low LED lights red (see Table 6-20) 5-20 PS1 (+24 VDC power supply) defective F1/F2 on A1 HV Inverter PCB blown...

  • Page 72: Ishikawa Diagram #15: Filament Load Fault

    5.3 Ishikawa Diagrams Section 5: Troubleshooting Ishikawa Diagram #15: Filament Load Fault Consequence Possible Causes Emitter Assembly Dirty/damaged emitter assembly Broken/damaged filament HV feedthrough damaged or coated Filament Load Fault LED lights red (see Table 6-22) 5-22) Incorrect filament status signal from A5 Interface PCB defective FPS.

  • Page 73: Troubleshooting Procedures

    Section 5: Troubleshooting 5.4 Troubleshooting Procedures Ishikawa Diagram #17: Emission Current Unstable Consequence Possible Causes HVPS A3 HV Regulator PCB Faulty/loose connections in HV path or output path Damaged emitter HV feedthrough shorted/damaged Emission Current Unstable Defective feedback cable or connection Defective A2 HV Output PCB A2J5 to A3J12 connection R4/R5 100 Ohm resistors...

  • Page 74: Table Number And Title

    5.4 Troubleshooting Procedures Section 5: Troubleshooting 5.4.2 Troubleshooting Tables This section contains the following troubleshooting tables: Table Number and Title Page No. Table 5-1 No Input Power Indicated ................... 5-16 Table 5-2 One or More Interlocks Not Made ................5-17 Table 5-3 General Condition: HVPS Powered Up But Fails to Achieve HV Ready State .....

  • Page 75: Table 5-2 One Or More Interlocks Not Made

    Section 5: Troubleshooting 5.4 Troubleshooting Procedures Table 5-2 One or More Interlocks Not Made Symptoms TCS displays PSU1_RDY_ALM ( = Power Supply Control Not Ready Timeout Alarm) • HVPS Front Panel: INTERLOCKS OK and POWER SUPPLY FAULT LEDs light red •...

  • Page 76: Table 5-4 Hvps And Fps Are Powered Up But Gun Ready State Not Achieved/Confirmed

    5.4 Troubleshooting Procedures Section 5: Troubleshooting Table 5-4 HVPS and FPS Are Powered Up but GUN READY State Not Achieved/Confirmed Symptoms TCS displays SRC1_GON_ALM ( = Source 1 Gun Control GO ON Timeout Alarm) • EBC issues FPS Gun Ctl Go On Timeout alarm •...

  • Page 77: Table 5-6 Fps Powered Up But Gun Does Not Switch On When Commanded To Do So

    Section 5: Troubleshooting 5.4 Troubleshooting Procedures DANGER: HIGH VOLTAGE Before performing any of the procedures described on this page, perform the procedure described in section 5.4.1. Table 5-6 FPS Powered Up but Gun Does Not Switch On When Commanded To Do So Symptoms TCS displays SRC1_GON_ALM (= Source 1 Control Go On Timeout Alarm) •...

  • Page 78: Table 5-8 No Beam Emitted After Hv And Gun Are Switched On

    5.4 Troubleshooting Procedures Section 5: Troubleshooting DANGER: HIGH VOLTAGE Before performing any of the procedures described on this page, perform the procedure described in section 5.4.1. Table 5-8 No Beam Emitted After HV and Gun Are Switched On Symptom: HV and gun are switched on, but no beam is emitted For additional information about this fault mode, see Ishikawa Diagram #3.

  • Page 79: Table 5-10 Filament Current Out Of Regulation

    Section 5: Troubleshooting 5.4 Troubleshooting Procedures 4. If the symptom is not in evidence during Step 3, troubleshoot the HV path and emitter assembly, following the instructions in the e-gun manual. If the symptom persists during Step 3, reconnect the HV output cable to J101, switch the power supply back on, and proceed with the troubleshooting steps described below.

  • Page 80: Table 5-12 Hvps Rail Undervoltage Led Lights Red

    5.4 Troubleshooting Procedures Section 5: Troubleshooting DANGER: HIGH VOLTAGE Before performing the following procedure, perform the procedure described in section 5.4.1. Table 5-12 HVPS RAIL UNDERVOLTAGE LED Lights Red Condition indicated: Rail voltage below 220 V dc (on 208-V units) or 427 V dc (on 400-V units) NOTE: Nominal rail voltage ranges are 264-323 V dc (for 208-V units) and 509-622 V dc (for 400-V units) Symptoms:...

  • Page 81: Table 5-13 Hvps Hv Overcurrent Led Lights Red

    Section 5: Troubleshooting 5.4 Troubleshooting Procedures DANGER: HIGH VOLTAGE Before performing the following procedure, perform the procedure described in section 5.4.1. Table 5-13 HVPS HV OVERCURRENT LED Lights Red Condition indicated: HV Output current is above 636 mA Symptoms TCS displays PSU1_FAIL_ALM (= Power Supply Control Is On failure alarm) •...

  • Page 82: Table 5-14 Hvps Hv Overvoltage Led Lights Red

    5.4 Troubleshooting Procedures Section 5: Troubleshooting DANGER: HIGH VOLTAGE Before performing the following procedure, perform the procedure described in section 5.4.1. Table 5-14 HVPS HV OVERVOLTAGE LED Lights Red Condition indicated: HV Output Voltage Is Above Maxiumum (i.e., 105% of Setpoint) Symptoms TCS displays PSU1_FAIL_ALM (= Power Supply Control Is On failure alarm) •...

  • Page 83: Table 5-15 Hvps Setpoint Overvoltage Led Lights Red

    Section 5: Troubleshooting 5.4 Troubleshooting Procedures DANGER: HIGH VOLTAGE Before performing the following procedure, perform the procedure described in section 5.4.1. Table 5-15 HVPS SETPOINT OVERVOLTAGE LED lights red Condition indicated: HV output voltage is above 10.5 kV when setpoint is 10 kV Symptoms TCS displays PSU1_FAIL_ALM (= Power Supply Control Is On failure alarm) •...

  • Page 84: Table 5-17 Hvps Inverter Overload Led Lights Red

    5.4 Troubleshooting Procedures Section 5: Troubleshooting DANGER: HIGH VOLTAGE Before performing the following procedure, perform the procedure described in section 5.4.1. Table 5-17 HVPS INVERTER OVERLOAD LED lights red Condition indicated: Inverter current > 150 A Symptoms TCS displays PSU1_FAIL_ALM (= Power Supply Control Is On failure alarm) •...

  • Page 85: Table 5-18 Hvps Overtemperature Led Lights Red

    Section 5: Troubleshooting 5.4 Troubleshooting Procedures DANGER: HIGH VOLTAGE Before performing the following procedure, perform the procedure described in section 5.4.1. Table 5-18 HVPS OVERTEMPERATURE LED lights red Conditions indicated: One or more of the following: IGBT temp > 678 C, heat sink Temp >778 C, fan stopped, fan rotating too slowly Symptoms TCS displays PSU1_FAIL_ALM (= Power Supply Control Is On failure alarm)

  • Page 86: Table 5-20 Hvps Auxiliary Supply Low Led Lights Red

    5.4 Troubleshooting Procedures Section 5: Troubleshooting Table 5-20 HVPS AUXILIARY SUPPLY LOW LED lights red Condition indicated: Control Supply voltage is below minimum value Symptoms TCS displays PSU1_FAIL_ALM (= Power Supply Control Is On failure alarm) • HVPS Front Panel: AUXILIARY SUPPLY LOW and POWER SUPPLY FAULT LEDs light red •...

  • Page 87: Fps Fuse Replacement Procedure

    Section 5: Troubleshooting 5.5 FPS Fuse Replacement Procedure Table 5-23 HV Is Switched On but FPS Front Panel HIGH VOLTAGE ON LED Fails To Light Symptoms HVPS Front Panel: HV switched on, with LEDs indicating nominal HVPS state • FPS Front Panel: HIGH VOLTAGE ON LED is unlit •...

  • Page 88: Figure 5-11 Prying Open The Fuse Block Cover On Fps Front Panel

    5.5 FPS Fuse Replacement Procedure Section 5: Troubleshooting Using a flat-bladed screwdriver, pry open the fuse block’s cover as shown in Figure 5-11. Figure 5-11 Prying Open the Fuse Block Cover on FPS Front Panel Using the same screwdriver, pry the fuse block out of its holder, as shown in Figure 5-12.
  • Page 89 Section 5: Troubleshooting 5.5 FPS Fuse Replacement Procedure Push the fuse block all the way into its holder and snap its cover back into place. Reconnect the FPS input power cable. Switch on facility breaker supplying power to the FPS. Set the FPS ON/OFF switch to the ON position.
  • Page 90 5.5 FPS Fuse Replacement Procedure Section 5: Troubleshooting CV-6SLX User Manual 5-32 0101-8242-0, Rev. C...
  • Page 91 Appendix A: Pinout Table for HVPS Rear Panel Diagnostic Port (HVPS J3) Signal Name/ Range Proportion Description Functional Component Cable Shield Analog Controls (0-10 V dc) HV Output Voltage 0-10 V dc 0-10 kV dc Fault at above 10.5 kV dc HV Output Current 0-10 V dc 0-1,000 mA dc Fault at above 630 mA dc HV Inverter IGBT Temperature...
  • Page 92 Appendix A: Pinout Table for Rear Panel Diagnostic Port (J3) CV-6SLX User Manual 0101-8242-0, Rev. C...

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