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Operation manual
High-voltage power supply unit
FERROTEC GmbH
Postfach 33
Seerosenstraße 1
72669 Unterensingen
Telefon:
+49 7022 - 9270-0
Telefax:
+49 7022 - 9270-10
Internet:
www.ferrotec-europe.com
E-Mail:
ebgun@de.ferrotec.com
Type:
Serial no:
Translation of the original Operation manual
CARRERA
Version 1.3_15
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Summary of Contents for ferrotec CARRERA
- Page 1 Operation manual High-voltage power supply unit Type: CARRERA Serial no: FERROTEC GmbH Postfach 33 Seerosenstraße 1 72669 Unterensingen Telefon: +49 7022 - 9270-0 Telefax: +49 7022 - 9270-10 Internet: www.ferrotec-europe.com E-Mail: ebgun@de.ferrotec.com Version 1.3_15 Translation of the original Operation manual...
- Page 2 If the machine is resold, the instruction handbook must always be delivered with it as well. Liability The manufacturer's liability for the CARRERA power supply is based on the principles of German law. The manufacturer accepts no liability for damage and losses due ...
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Page 3: Table Of Contents
High Voltage Power Supply Type: CARRERA Table of Content Table of content Table of Content Table of content Table of pictures Manufacturer's Declaration Overview and Intended Use Overview CARRERA-System Intended Use Explanation of terms Technical specifications 2.4.1 Dimensions and weight 2.4.2... - Page 4 High Voltage Power Supply Type: CARRERA Transportation to the point of Installation ( by Operator) Assembly, Installation (only for trained personnel) 5.5.1 Assembly 5.5.2 Electric Connection 5.5.3 Overview of the electrical connectors and fuses 5.5.4 Connection of the high-voltage power supply...
- Page 5 Electrical connections of the high voltage power supply ( back side) Fig. 4 Delivery package Fig. 5 Wiring diagram of the CARRERA 3/5/6 high voltage power supply Fig. 6 Wiring diagram of the CARRERA 10/12 high voltage power supply Fig. 7 Overview of electrical connectors and fuses Fig.
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Page 6: Manufacturer's Declaration
High Voltage Power Supply Type: CARRERA Manufacturer's Declaration Version 1.3_15 EN... -
Page 7: Overview And Intended Use
High Voltage Power Supply Type: CARRERA Overview and Intended Use Overview CARRERA-System Fig. 1 Overview CARRERA system The complete evaporator package consist of the following: High voltage power supply HVP Electron beam evaporator controler GENIUS with hand remote control Filament power supply (FPS) -
Page 8: Intended Use
High Voltage Power Supply Type: CARRERA Intended Use The high voltage power supply HVP is part of a group of devices for the operation of an electron beam evaporator installed in a vacuum chamber.. The group of devices consists of:... -
Page 9: Explanation Of Terms
High Voltage Power Supply Type: CARRERA Proper use of the machine in accordance with its intended use includes compliance with the manufacturer's operating, maintenance and repair instructions. The use is restricted to rooms in a building or halls. HINWEIS Notice on application of the EMC Directive 2004/108/EC in the... -
Page 10: Technical Specifications
High Voltage Power Supply Type: CARRERA Technical specifications 2.4.1 Dimensions and weight Width: 483 mm Height ( 3, 5 und 6 kW units): 175 mm Height (10 und 12 kW units): 350 mm Depth: 550 mm Weight: approx. 28,5 kg 2.4.2... -
Page 11: Safety
High Voltage Power Supply Type: CARRERA Safety Notes / Explanations DANGER “DANGER” warns of dangerous situations. Avoid these dangerous situations! Otherwise they could result in severe injury or death. WARNING “WARNING” warns of dangerous situations. Avoid these dangerous situations! Otherwise they could result in severe injury or death. -
Page 12: Explanation Of Used Safety Symbols
High Voltage Power Supply Type: CARRERA 3.1.1 Explanation of used safety symbols DANGER Danger from electric current framed and marked with the symbol shown opposite. DANGER Danger of burns framed and marked with the symbol shown opposite. DANGER Danger of your hands being crushed or injured framed and marked with the symbol shown opposite. -
Page 13: Machine Identification
High Voltage Power Supply Type: CARRERA 3.1.2 Machine Identification Seriel-Nummber The information in this instruction handbook only applies to the High voltrage power supply whose type designations are given on the title page The identification plate including the serial number is attached on the back of the high voltage power supply. -
Page 14: Integrated Safety Systems
High Voltage Power Supply Type: CARRERA Integrated Safety Systems The integrated safety systems must be checked at regular intervals (d= daily, w = weekly, m = monthly, ½ y = half-yearly, y = yearly). The test methods that are to be applied are: V = visual inspection, F = function test, M = measurement. - Page 15 The operating and maintenance personnel are trained in the use of the machine at its point of installation by personnel from FERROTEC GmbH. Should you have any questions or be uncertain about anything, please contact FERROTEC GmbH. NOTICE It is strictly forbidden to render any of the safety systems inoperative or to modify their action.
- Page 16 High Voltage Power Supply Type: CARRERA NOTICE The type, scope and action of the safety systems were arranged with the operator. Version 1.3_15 EN...
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Page 17: Overview Of Electrical Connections
High Voltage Power Supply Type: CARRERA Overview of electrical connections Fig. 2 Electrical connections of the high voltage power supply ( front side) Front side of the high voltage power supply: Transportation handle ON/OFF switch Air filter inlet LED-Display Fig. 3... -
Page 18: Safety Precautions (By The Operator)
High Voltage Power Supply Type: CARRERA 11 Mains supply 12 Connection Master/Slave: Control signal 13 Connection Master/Slave: Interlock signal Safety Precautions (by the Operator) The operator must: instruct his operating and maintenance personnel in the use of the safeguards of the electron beam evaporator and ensure the safety precautions are being observed including the use of personal protective equipment. - Page 19 High Voltage Power Supply Type: CARRERA Instructed Person A person familiarised with and, if applicable, trained in his or her particular duties by a skilled person and advised of the risks of improper conduct and about the necessary safeguards and safety precautions.
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Page 20: Responsibilities Of The Operator
High Voltage Power Supply Type: CARRERA Responsibilities of the Operator NOTICE In the EEA (European Economic Area) national implementation of the framework directive 89/391/EEC and corresponding individual directives, in particular the directive 2009/104/EEC concerning the minimum safety and health requirements for the use of work equipment by workers at work, as amended, are to be observed and adhered to. - Page 21 High Voltage Power Supply Type: CARRERA The switching and safety facilities for setting up, testing, shutting down (including shutting down in an emergency), operation, maintenance, cleaning and servicing are to be installed and verified by the person setting up the entire unit.
- Page 22 NOTICE The owner envisages only one earth circuit connector on the floor of the vacuum chamber. All the devices (Carrera, GENIUS, FPS, and grounding rod) are to be connected in star form from this earthing point. Use the grounding points that have been provided at the individual devices for this purpose.
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Page 23: Safety Inspections And Tests
High Voltage Power Supply Type: CARRERA Safety Inspections and Tests Factory inspections and tests by the manufacturer. Airborne noise measurement - According to the Machinery Directive (Position 1.7.4/f) Tests and inspections in terms of DIN EN 60204-1 (Edition 2007) - Check whether the electrical equipment corresponds to the technical documentation (chap. -
Page 24: General Warnings
The machine is operated from the control unit in combination with the GENIUS controller, the CARRERA high voltage power supply and the overall plant. Note that a fan is built into the high-voltage mains device. Ensure that there is clear space of 20 cm before and in front of the unit to ensure a free and continuous flow of air. -
Page 25: Operating Areas And Danger Zones At The Machines
High Voltage Power Supply Type: CARRERA Operating Areas and Danger Zones at the Machines The operating area is defined by the operator (overall plant). The danger zone during adjustment and maintenance work is the immediate area around the high voltage power supply. -
Page 26: Operating And Maintenance Personnel
High Voltage Power Supply Type: CARRERA Operating and Maintenance Personnel The operating and maintenance personnel are those people responsible for the transport, assembly, installation, operation, adjustment and cleaning of the machine as well as for troubleshooting. The machine may only be operated by trained and authorised personnel. -
Page 27: Spare And Wearing Parts
The fitting and/or use of such products could therefore negatively affect the design characteristics of your machine. FERROTEC GmbH accepts no liability for damages arising from the use of non-original parts and non-original accessories. -
Page 28: Shutdown Procedure
High Voltage Power Supply Type: CARRERA Shutdown Procedure NOTICE The shutdown procedure may only be initiated by skilled personnel according to the definition in DIN EN 60 204 (see also chap. 3.5). DANGER The following procedure for switching off is to be followed without fail before carrying out any cleaning, repair or maintenance work. -
Page 29: Installation
High Voltage Power Supply Type: CARRERA Installation Delivery package Instruction handbook Fig. 4 Delivery package The delivery package consists of: High voltage power supplyt HVP Instruction handbook Y-Kabel (see Fig. 5-2) Nr. 950040 Harting plug and accessory Interlock with 3 Allen srews M4-10 mm Grounding cable (see Fig. -
Page 30: Transport And Packaging
High Voltage Power Supply Type: CARRERA Transport and Packaging Machines, devices and other equipment from FERROTEC GmbH are carefully inspected and packed before shipment. Nevertheless, it is still possible that they might become damaged during transit 5.2.1 Delivery (also for Spare and replacement Parts) -
Page 31: Intermediate Storage
High Voltage Power Supply Type: CARRERA Intermediate Storage The freight packaging of the electron beam evaporator and spare and replacement parts is designed for a storage period of three months from delivery. Storage Conditions Closed and dry room with a room temperature of +5°C to +40°C. -
Page 32: Assembly, Installation (Only For Trained Personnel)
Assembly, Installation (only for trained personnel) Assembly and initial start-up must be carried out by skilled personnel from FERROTEC GmbH or the customer's skilled personnel who have been especially trained for this work. Consult the instruction handbook and technical reference material supplied for assembly and installation of the electron beam evaporator. - Page 33 High Voltage Power Supply Type: CARRERA Connect the filament power supply to the emergency switching system of the whole equipment. DANGER Please, note that before the connection of the high-voltage power supply unit the complete cabling of the vacuum system, the electron beam vaporizer, the filament power supply and the Genius control unit must be installed.
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Page 34: Wiring Diagram Of The Carrera 3/5/6 High Voltage Power Supply
High Voltage Power Supply Type: CARRERA Fig. 5 Wiring diagram of the CARRERA 3/5/6 high voltage power supply Fig. 6 Wiring diagram of the CARRERA 10/12 high voltage power supply Version 1.3_15 EN... -
Page 35: Overview Of The Electrical Connectors And Fuses
High Voltage Power Supply Type: CARRERA 5.5.3 Overview of the electrical connectors and fuses Fig. 7 Overview of electrical connectors and fuses The electric connectors and fuses are found on the rear panel of the high-voltage power supply unit.. Fuses... -
Page 36: Connection Of The High-Voltage Power Supply Unit
High Voltage Power Supply Type: CARRERA 5.5.4 Connection of the high-voltage power supply unit Connect the high-voltage power supply unit in accordance with the wiring diagram. The following components are to be connected: - High-voltage cable (the cable and connectors are part of the... - Page 37 High Voltage Power Supply Type: CARRERA Earthing line Connect the earthing contact X300 of the high-voltage power supply unit to the earthing point of the vacuum chamber. For this purpose use a cable with cable lugs, green/yellow wire sheathing and the cross-section of 16 mm².
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Page 38: Interlock Connector
High Voltage Power Supply Type: CARRERA Analoger Interface-Stecker X302: (9-polige Sub.-D Buchse) Analog Input: PIN 1 High voltage-Setpoint (0...10 V DC) PIN 2 High voltage-Setpoint Analog Output: PIN 5 High voltage-actual value (0...10 V DC) PIN 6 High voltage-actual value... -
Page 39: Harting Plug, Connector Assignment Of The Power Supply Cable
High Voltage Power Supply Type: CARRERA Main supply line The mains supply line is used to connect the high-voltage power supply unit to the mains. 1. Connect the mains supply line with the Harting plug to the X301 connector. DANGER First make sure whether the mains supply line is without voltage. -
Page 40: Functional Description
High Voltage Power Supply Type: CARRERA Functional description Fig. 10 Overview high voltage power supply Transportation handles ON / OFF switch Air inlet with the filter mat (replaceable) Housing LED-Indicators Analog interface (connection to the control unit) Digital interface (connection to the control unit) - Page 41 High Voltage Power Supply Type: CARRERA Function The high-voltage power supply unit produces high voltage for an electron beam vaporizer that is incorporated in a vacuum device. The maximum power output of the unit is 3, 5, 6, 10 odr 12 kW.
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Page 42: Putting In Operation For The First Time (For Specialized Personnel Only)
High Voltage Power Supply Type: CARRERA NOTICE To get a complete overview of the operation of the high-voltage power supply unit you should read the instructions concerning the operation of the filament power supply (FPS) in connection with the electron beam vaporizer described in the Appendix... - Page 43 High Voltage Power Supply Type: CARRERA NOTICE Carry out the relevant tests in compliance with 60 204, item 19. Before carrying out the work, remove the Harting plug to avoid any damage to the electronics. Note VDE 0721-3032 (test procedures for electronic heating...
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Page 44: Operation
High Voltage Power Supply Type: CARRERA Operation WARNUNG The high voltage power supply can only be operated by trained personne.l Operation and displaying elements 6 5 4 3 2 Fig. 11 Overview of operation and display elements The operation and displaying elements are found on the front panel of the high-voltage power supply unit. -
Page 45: Operation Modes
High Voltage Power Supply Type: CARRERA Operation modes NOTICE The operating modes are described in the separate operating instructions of the components of the operating system. 7.2.1 Operation The high-voltage power supply unit can only be operated in connection with a control unit of the corresponding vacuum device with a built-in electron beam vaporizer and filament power supply. -
Page 46: Switching Off
High Voltage Power Supply Type: CARRERA 7.2.3 Switching off NOTICE Please note, that the high-voltage power supply unit will only be switched off when the production process in the vacuum device has finished. When switching the system off, proceed as follows: 1. -
Page 47: Cleaning/Maintenance
DANGER The operating and maintenance personnel are trained in the use of the electron beam evaporator at its point of installation by personnel from FERROTEC GmbH. Should you have any questions or be uncertain about anything, please contact FERROTEC GmbH. - Page 48 High Voltage Power Supply Type: CARRERA NOTICE The times specified in this instruction handbook are based on one-shift operation (8 hours/day, 22 days/month, 12 months/year). = Daily ½ Y = Half-yearly = Weekly Y = Yearly = Monthly W.Hr. = Work hours ¼...
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Page 49: Complete Daily Cleaning
Cleaning of the housing; and Replacement of the filter mat at the air inlet. NOTICE If there is a need of other maintenance work, please, contact the FERROTEC GmbH Company. Version 1.3_15 EN... -
Page 50: Function Test Plan
High Voltage Power Supply Type: CARRERA 8.3.1 Function test plan Interval for One-Shift System ½ Y Emergency stop system (emergency stop buttons) Mains isolator (main switch) Check all electric terminal and plug connections Push buttons and switches on the switch cabinet... - Page 51 If you operate the high-voltage power supply unit without a filter mat, you should send the unit regularly to the FERROTEC GmbH Company for cleaning. DANGER...
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Page 52: Inspection Of The Machine
High Voltage Power Supply Type: CARRERA Inspection of the machine After completing cleaning, maintenance and repair work: 1. Check that the protective conductor connections are firm. 2. Check that the work has been carried out properly and fully. NOTICE After checking and replacing spare and wearing parts make sure that all safety systems are in working order.. -
Page 53: Troubleshooting
These technicians must be equipped with the proper tools and test materials. The shutdown procedure (see chap. 8) must be carried out before all maintenance and repair work. If the measures described below do not prove successful, please contact FERROTEC GmbH. Fault Cause Remedy Power supply cannot be... -
Page 54: Emergency
High Voltage Power Supply Type: CARRERA Emergency In the event of an emergency: 1. Press the emergency stop button on the master control unit. The emergency stop button is released by pulling out or turning anticlockwise/clockwise. 2. Switch off the main switch if necessary. -
Page 55: Dismantling/Disposal
High Voltage Power Supply Type: CARRERA Dismantling/Disposal Dismantling Dismantling may only be performed by skilled personnel. Make sure the shutdown procedure is followed before beginning dismantling work. Disposal The machine is primarily made of copper (except for the electrical equipment) and must be disposed of in accordance with local... -
Page 56: Appendix; Options
High Voltage Power Supply Type: CARRERA Appendix; Options 12.1 Appendix 1; Control unit GENIUS Control unit GENIUS including hand remote The options include: Overview and Intended Use /Explanations Table of content / pictures Safety General Warnings Technical data Scope of delivery... -
Page 57: Appendix 2; Filament Power Supply Fps
High Voltage Power Supply Type: CARRERA 12.2 Appendix 2; Filament Power Supply FPS The options include: Overview and Intended Use /Explanations Table of content / pictures Safety General Warnings Technical data Scope of delivery Transportation, Packaging and Storage Set up and mounting...