Figure 2-3 System Low Impedance Grounding Requirements - ferrotec Temescal CV-6SLX User Manual

Section 2: Installation
2.5.2 System Low-Impedance Grounding
Within the vacuum system, the low-impedance ground is provided by 3"-wide and 1/2"-wide
copper straps. As Figure 2-3 shows, these straps must connect:
the grounding stud labeled RF GND on the power module's rear panel (see Figure 2-4) to a
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grounding point on the frame of the operator station
the operator station's grounding point to the vacuum cubicle's central grounding point
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the grounding stud labeled RF GND on the FPS front panel (see Figure 2-5) to the vacuum
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cubicle's main grounding point
the source tray to the vacuum cubicle's main grounding point.
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Figure 2-3 System Low Impedance Grounding Requirements

2.5.3 Power Module Grounding
Make connections to the power supply's grounding lugs as shown in the CV-6SLX Quick Start
Guide (PN 0101-8241-1), following the procedure described below.
0101-8242-0, Rev. C
Step Action
1 A roll of 1/2"-wide copper strap (PN 5621-0032-0) is supplied with
the unit. Cut off a length of this strap that will easily extend from
the grounding lugs on the power module's rear panel to the
operator station's frame.
2-5
2.5 Grounding Requirements
CV-6SLX User Manual