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2.5
Materials exposed to gases pumped
The following materials and component types are exposed to the gases pumped: aluminium alloys, stainless steels,
fluoroelastomer and nitrile O-rings, hydrocarbon lubricant, felt, rare earth magnets, silicon nitride, phenolic resin
and carbon-fibre reinforced epoxy resin.
Figure 1 - Dimensions of the EXT 200/200H split flow pump system (units in mm)
© Edwards Limited 2010. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
1. TAV5 vent valve
2. 8 slots 8.4 mm wide
3. Side inlet
4. Main inlet
5. EXDC controller
6. Backing port
B756-01-880 Issue J
Page 9
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