Design - NT-MDT NTEGRA Spectra Instruction Manual

Inverted configuration with renishaw spectrometer
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2. Design

Fig. 2-1 shows general view of the NTEGRA Spectra PNL instrument.
NTEGRA Spectra PNL consists of the following main parts:
Inverted measuring unit:
Inverted optical microscope Olympus IX71;
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Base unit of NTEGRA;
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XY scanning optical exchangeable mount.
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Measuring heads:
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- SNOM;
- AFM.
Podule measuring unit (For details, please, refer to Renishaw user's manual).
Spectral unit (For details, please, refer to Renishaw user's manual):
Spectrometer;
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Laser.
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Fig. 2-1. NTEGRA Spectra PNL
Chapter 2. Design
7

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