NT-MDT NTEGRA Spectra Instruction Manual page 14

NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Renishaw Spectrometer).
1 – probe holder; 2 – spring clips; 3 – bottom of the scanner;
operating distance and maintaining that distance during probe scanning of the sample.
Position of the probe in the XY plane during scanning is controlled with capacitance
sensors.
Technical specifications of the SNOM measuring head:
Scan range:
− in XY plane
− in Z direction
Resolution:
− shear Force method:
in XY plane
in Z direction
− optical method:
in XY plane
in Z direction
Number of pixels
Probe-to-sample approach mode
14
Fig. 2-7. Probe holder assembly
4 – protective case; 5 – optical fiber input orifice
100×100 m
7 m
< 100 nm
< 1 nm
~ 100 nm
–
up to 1024×1024
automated (motorized)