Overview - NT-MDT NTEGRA Spectra Instruction Manual

1. Overview

NTEGRA Spectra PNL combines measurement capabilities of spectrometry, SNOM and
AFM, which are enhanced by SNOM-spectrometry and AFM-spectrometry.
Theses capabilities are illustrated by the conceptual scheme of Fig. 1-1.
Fig. 1-1. Conceptual scheme of the NTEGRA Spectra PNL
The spectrometer is based on the infinity-corrected confocal optical scheme that provides
submicron spatial resolution (200÷300 nm in the lateral (XY) and 500÷700 nm in the
normal (Z) directions). High spectral resolution (several tenths of angstrom) is achieved
due to the Czerny-Turner optical schematics of the spectrometer. For excitation of
secondary emission, a gas or solid-state laser is employed. The spatial (XYZ) information
is acquired with a special scanning system. A more detailed description of the instrument is
provided below.
NTEGRA Spectra PNL provides the following options of measurements:
− performing spectral measurements at a certain point and acquiring spectral
characteristics of various materials when the instrument operates as a regular
spectrometer;
− measuring secondary signal intensity in the selected wavelength range in the mode of
layer-specific volumetric scanning of the area 100x100x30 μm;
− acquiring optical images of the object when the instrument operates as a regular laser
confocal microscope.
Chapter 1. Overview
5