NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Renishaw Spectrometer).
4. Operating Conditions
The SPM should be installed in a room of total area larger 12 sq. meters that provides
range of purity better 7÷8 (by ISO 14644-1).
For normal operation of the instrument, the following operating conditions are
recommended:
−
Ambient temperature:
−
Temperature stability:
−
Relative humidity at +25 °C
−
Range of purity 7÷8 (by ISO 14644-1);
−
Vibration amplitude
in the band 1 ÷ 1000 Hz less 0.5 m;
−
Atmospheric pressure
−
Supply voltage 220 V (+10%/-15%), 50/60 Hz with grounding;
−
The working room must be protected from mechanical vibrations, airflows and
acoustic noise, both internal and external;
−
Vibration criterion VC-C, 12.5 µm/s (one-third octave band criterion);
−
The device must be protected from the direct sunbeams;
−
To provide solid stability against vibrations, SPM modules should be placed on self-
leveling floor with marble covering alongside bearing components of the building
(pillows, beams etc.);
−
The measuring unit of the instrument (the base unit with the measuring head) should
be placed on a separate table away from computers and monitors, to eliminate
electromagnetic interference;
22
(25±10) °C;
better 1˚С per hour;
less than (65±15) %;
760 ±25 mm Hg;