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NT-MDT NTEGRA Spectra Instruction Manual

Inverted configuration with renishaw spectrometer
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NTEGRA Spectra
(Inverted Configuration
with Renishaw Spectrometer)
Instruction Manual
12 April 2010
Copyright © NT-MDT
spm@ntmdt.ru
support@ntmdt.ru

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  • Page 1 NTEGRA Spectra (Inverted Configuration with Renishaw Spectrometer) Instruction Manual 12 April 2010 Copyright © NT-MDT Web Page: http://www.ntmdt.com General Information: spm@ntmdt.ru Technical Support: support@ntmdt.ru NT-MDT Co., building 100, Zelenograd, 124482, Moscow, Russia Tel.: +7 499-735-7777 Fax: +7 499-735-6410...
  • Page 2 Read me First! Observe safety measures for operation with devices containing sources of laser radiation. Do not stare into the beam. A label warning about the presence of laser radiation is attached to the measuring head (Fig. 1) as well as to the laser sources. Fig.
  • Page 3 User’s documentation set The following manuals are included into the user’s documentation set: − Instruction Manual – is the guidance on preparation of the instrument and other equipment for operation on various techniques of Scanning Probe Microscopy. The contents of the user’s documentation set may differ depending on the delivery set of the instrument.

  • Page 4: Table Of Contents

    NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Renishaw Spectrometer). NTEGRA Spectra PNL (Inverted Configuration with Renishaw Spectrometer) Table of Contents 1. OVERVIEW ............................. 5 2. DESIGN..............................7 2.1......................8 NVERTED EASURING 2.1.1. Inverted Optical Microscope ..................... 8 2.1.2. NTEGRA Base Unit ......................9 2.1.3.

  • Page 5: Overview

    Chapter 1. Overview 1. Overview NTEGRA Spectra PNL combines measurement capabilities of spectrometry, SNOM and AFM, which are enhanced by SNOM-spectrometry and AFM-spectrometry. Theses capabilities are illustrated by the conceptual scheme of Fig. 1-1. Fig. 1-1. Conceptual scheme of the NTEGRA Spectra PNL The spectrometer is based on the infinity-corrected confocal optical scheme that provides submicron spatial resolution (200÷300 nm in the lateral (XY) and 500÷700 nm in the...
  • Page 6 NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Renishaw Spectrometer). In addition to measurements, the NTEGRA Spectra PNL facilitates to perform volumetric lithography. The SNOM-Spectrometer configuration allows the following: − measuring surface topography with the Shear Force Microscopy; − in the transmission mode, measuring optical and spectral properties of the object with the resolution achievable by the Scanning Near-field Optical Microscopy.

  • Page 7: Design

    Chapter 2. Design 2. Design Fig. 2-1 shows general view of the NTEGRA Spectra PNL instrument. Fig. 2-1. NTEGRA Spectra PNL NTEGRA Spectra PNL consists of the following main parts: − Inverted measuring unit: Inverted optical microscope Olympus IX71; Base unit of NTEGRA;...

  • Page 8: Inverted Measuring Unit

    NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Renishaw Spectrometer). − Detectors: Renishaw CCD camera; Andor CCD camera (availability depends on the delivery set). − Optical viewing system. − Control system: Main SPM controller; Slave SPM controller; Computer. 2.1. Inverted Measuring Unit 2.1.1.

  • Page 9: Ntegra Base Unit

    Chapter 2. Design The microscope is equipped with an optical system that provides the following options for NTEGRA Spectra: − delivering laser beam to the sample; − delivering the light reflected from the sample to the spectrometer; − monitoring the process of approaching the lens to the sample;...

  • Page 10: Xy Scanning Optical Exchangeable Mount

    NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Renishaw Spectrometer). – connector for the scanner or for the scanner with built-in sensors, SCAN+SENSOR used for connecting either the exchangeable scanner or the measuring head scanner; –connector of a heating element, used for connecting a heating stage, heating Т...
  • Page 11 Chapter 2. Design Fig. 2-4 XY Scanning Optical Exchangeable Mount 1 – measuring head seats; 2 – measuring head positioning screws; 3 – XY positioning device micrometer screws; 4 – sample stage; 5 – spring clips; 6 – scanning platform The scanning platform 6 serves to move the investigated sample in the process of XY scanning.

  • Page 12: Measuring Heads

    2.1.4. Measuring Heads Scanning probe measuring heads available in NTEGRA Spectra PNL extend performance of the device. They facilitate investigations with techniques quite distinct from the confocal measurements. For example, topography of the sample surface with atomic resolution can be acquired.
  • Page 13 Chapter 2. Design Fig. 2-6. SNOM measuring head 1 – output orifice for the optical fiber; 2 – leveling posts; 3 – probe holder; 4 – housing; 5 – mounting plate; 6 – motorized leveling post All elements of the SNOM measurement head are assembled on the mounting plate 5 and contained within the housing 4.
  • Page 14 NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Renishaw Spectrometer). Fig. 2-7. Probe holder assembly 1 – probe holder; 2 – spring clips; 3 – bottom of the scanner; 4 – protective case; 5 – optical fiber input orifice operating distance and maintaining that distance during probe scanning of the sample.
  • Page 15 Chapter 2. Design AFM measuring head The AFM measuring head (Fig. 2-8) is used for qualitative and quantitative measurements of near-surface characteristics of various objects and properties of physical fields of associated with these objects. Fig. 2-8. AFM measuring head 1 –...

  • Page 16: Additional Cables

    NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Renishaw Spectrometer). Fig. 2-9. Probe holder assembly 1 – probe; 2 – sapphire pedestal; 3 – spring clip; 4 – trapezium lever Design of the probe holder is shown in Fig. 2-9. The probe 1 is set on the sapphire pedestal 2 and is fixed by the spring clip 3.
  • Page 17 Chapter 2. Design This connection needs additional cables, a switching cable and a Z-splitter, which distribute signals from the scanners of the measuring head, of the exchangeable mount, and of the lens. The Z-splitter separates signals from the slave controller to different scanners. Z-socket of the splitter (pos.

  • Page 18: Detectors

    For details on the CCD camera, refer to Renishaw user’s manual. 2.3. Controllers The main and slave controllers are used to control the NTEGRA Spectra PNL measurement system and to process signals from measuring heads, to convert signals from the control software as well as to control the scanners, the probe holder piezo-drive, and auxiliary devices.

  • Page 19: Computer

    Chapter 2. Design 2.4. Computer The computer controls the PNL NTEGRA Spectra electronics. Besides, the control software installed on the computer allows to process the measuring data. The computer is connected to the main and slave controllers, to the spectrometer, and to the Andor CCD- camera.

  • Page 20: Basic Safety Measures

    NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Renishaw Spectrometer). 3. Basic Safety Measures General Safety Measures − Ground the instrument before operation! − Do not disassemble any part of the instrument. Disassembling of the product is permitted only to persons certified by NT-MDT Co.
  • Page 21 Chapter 3. Basic Safety Measures Fig. 3-2 Scanner − Do not press the scanner more than it is needed to install the probe. Avoid scanner shocks and its lateral deformation. Remember that the width of scanner walls is only 0.5 mm. Optical components Optical components include the following units and elements: −...

  • Page 22: Operating Conditions

    NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Renishaw Spectrometer). 4. Operating Conditions The SPM should be installed in a room of total area larger 12 sq. meters that provides range of purity better 7÷8 (by ISO 14644-1). For normal operation of the instrument, the following operating conditions are recommended: −...
  • Page 23 Chapter 4. Operating Conditions − The table for installation of the measuring unit of the instrument must be stable and, whenever possible, massive. Heat flow and draughts badly influence the instrument.

  • Page 24: Storage And Transport Regulation

    NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Renishaw Spectrometer). 5. Storage and Transport Regulation Storing The units must be stored in package in a clean room with a stable temperature and humidity: − storage temperature (20±10) °С; − storage humidity less 80 %.

  • Page 25: General Requirements On Installation

    NTEGRA Spectra PNL is a precise optical device. Special requirements on the work room, on the power supply system, and on the optical table should be met. NTEGRA Spectra PNL should be installed in a dark room of area of 12 m (3×4 m ).

  • Page 26: Setup And Installation

    NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Renishaw Spectrometer). 7. Setup and Installation The NTEGRA Spectra PNL is put into operation by an authorized person after installation. 7.1. Connecting the Electromechanical Units  ATTENTION! Before connecting or disconnecting any parts of the instrument, power off the controller.
  • Page 27 Chapter 7. Setup and Installation b. connector of the switching cable (pos. 2 on Fig. 7-2);  ATTENTION! Strictly follow this sequence of connecting the cables! Otherwise, failure of the instrument is highly probable. c. connector of the measuring head scanner (pos. 3 on Fig. 7-2). SCAN+SENSOR Fig.

  • Page 28: Powering Sequence

    NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Renishaw Spectrometer). 7.2. Powering Sequence Switching on  ATTENTION! Tighten up all connectors before turning the controllers on. Disconnection of connectors during operation may cause damage to the electronic components. 1. Switch on the spectrometer pushing the button at the power box.
  • Page 29 Chapter 7. Setup and Installation tab, define the final CCD-matrix temperature to be 20 °C and wait until Andor CCD the matrix reaches the prescribed temperature.  ATTENTION! Do not close the Control program if temperature of the CCD-matrix is lower 0 С. 2.

  • Page 30: Preparing For Operation

    NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Renishaw Spectrometer). 8. Preparing for Operation Basic preparatory procedures include the following: 1. Switching on the Instrument (see i. on page 30) 2. Verifying Adjustment of the Displacement Sensors (see i. on page 30) 3.

  • Page 31: Mounting The Sample

    Chapter 8. Preparing for Operation 8.3. Mounting the Sample To mount the sample, perform the following steps: 1. Dislocate the lens down by rotating the manual approach knob clockwise (see pos. 2 in Fig. 2-3). 2. Prepare the sample for measurement by placing it on a glass substrate and fixing this assembly, if necessary.

  • Page 32: Measuring With The Confocal Microscopy Mode

    NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Renishaw Spectrometer). 9. Measuring with the Confocal Microscopy Mode Preparation of the device for operation (see Chapter on p. 30) is supposed before starting measurements with confocal microscopy techniques. The confocal scanning includes the following main operations: 1.

  • Page 33: Approaching The Sample And Focusing The Laser Beam

    Chapter 9. Measuring with the Confocal Microscopy Mode 9.2. Approaching the Sample and Focusing the Laser Beam Confocal scanning needs the sample to be at the focal plane of the lens. To place the sample at the required position, perform the following steps: 1.

  • Page 34: Adjusting Channels Of Detection

    NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Renishaw Spectrometer). 3. Approach the sample to the lens slowly and very carefully by rotating the manual approach knob and observing the sample on the display of the viewing system. Control the lens focus by contrast of the sample image or by focusing the laser beam on the sample (if the spectrometer laser is on).
  • Page 35 Chapter 9. Measuring with the Confocal Microscopy Mode 4. Define cooling temperature of the CCD-matrix (in the range of –40÷–50 °C) in the input field available in the Toolbar (Fig. 9-5). Set T(°C) Fig. 9-5. Toolbar 5. Start cooling the CCD-matrix by pressing the button placed to the right of the input field.
  • Page 36 NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Renishaw Spectrometer). Fig. 9-7. Image collected with the CCD-matrix  NOTE. To activate the option of scan-time updating the spectrum image, click the button. 3. Using the collected image, select a band of the CCD-matrix that receives the spectral signal from the sample.

  • Page 37: Adjusting Signal Detection With The Renishaw Ccd Camera

    Chapter 9. Measuring with the Confocal Microscopy Mode Fig. 9-10. Spectrum collected over a limited band of the CCD-matrix 9.3.2. Adjusting Signal Detection with the Renishaw CCD camera 1. Switch to the tab (click button on the Main Operations Panel). Spectra 2.
  • Page 38 NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Renishaw Spectrometer). Acquisition Spectral acquisition setup Fig. 9-12. tab of the window b. Go to the tab by clicking the corresponding title. Acquisition c. Enter the exposure time in the range of 0.3÷1 s in the input field.

  • Page 39: Adjusting Scan Parameters

    Chapter 9. Measuring with the Confocal Microscopy Mode 9.4. Adjusting Scan Parameters Scanning is performed by the sample with the use of the scanner of the exchangeable mount. Scanning parameters are adjusted with the tab. Scan(Master) 1. Go to the tab by clicking the corresponding title at the left top of the Scan(Master) tab (Fig.

  • Page 40: Additional Adjusting For Scanning With Afm Head

    NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Renishaw Spectrometer). for 2D scanning: a. Enable the function of selecting the scan area by pressing the button ig. 9-17 in the Toolbar. b. Change size and position of the scan area with the mouse.
  • Page 41 Chapter 9. Measuring with the Confocal Microscopy Mode 3. Adjust parameters of the preliminary scan. 4. Approach the probe tip to the lens optical axis. 5. Perform the preliminary scan and precise alignment of the tip. These operations are explained below in detail. Preparing and Mounting the Measuring Head Operations on preparation and mounting of the measuring head are given in detail in the manual Performing measurements, Ch.
  • Page 42 NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Renishaw Spectrometer). Fig. 9-19. Scanning direction 4. Select the item in the drop-down list and enter numbers of scan points Point Number over scan axes X and Y (Fig. 9-20). Fig. 9-20. Defining numbers of scan points for every direction 5.
  • Page 43 Chapter 9. Measuring with the Confocal Microscopy Mode Approaching Probe to Lens Optical Axis 1. Approach the sample to the probe by contact or semicontact mode. Details are explained in Performing Measurements, part 3. 2. Retract the probe from the sample to distance of 0.1÷0.2 mm through the following steps: a.
  • Page 44 NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Renishaw Spectrometer). A convenient way to observe the displacement process is with the image from the upper videomicroscope. If the instrument doesn’t contain the upper videomicroscope, the displacement can be viewed in the mirror of the measuring head (Fig. 9-26).
  • Page 45 Chapter 9. Measuring with the Confocal Microscopy Mode Range Spectral acquisition setup Fig. 9-27. tab of the window b. Go to the tab by selecting the corresponding title. Range c. In the input field of the panel, define the center of the Centre Spectrum Range detected spectrum so that the bounds...

  • Page 46: Scanning

    NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Renishaw Spectrometer). Select Signal Fig. 9-29. Selecting the signal in the window c. Click the button to enable the modifications and to close the window. 7. In the field , define time for the scanner to pass from a point of scanning to Time/point the next one.
  • Page 47 Chapter 9. Measuring with the Confocal Microscopy Mode acquisition with the Andor and Renishaw cameras are explained in sec. 9.3.1 on p. and in sec. 9.3.2 on p. 37, respectively). Fig. 9-30. Peaked regions are selected in the spectrum The highlighted regions will be displayed in the table (Fig.
  • Page 48 NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Renishaw Spectrometer). Fig. 9-33 6. Go to the tab (Fig. 9-34) by clicking the corresponding title at the left top Scan(Master) of the tab. Spectra Scan Fig. 9-34. Control panel of the 7. Choose a signal for registration: a.

  • Page 49: Saving Data

    File Save 2. A dialog box will appear. Define the folder to store the data (by default, it is C:\Program Files\NT-MDT\Nova). 3. Type in a filename and save it with the extension *.mdt.  NOTE. By default, the images obtained are stored in files “NoNameXX.mdt”, where XX is the file index in the folder Nova .
  • Page 50 NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Renishaw Spectrometer). 3. Withdraw the probe from the sample through the following sequence of operations: a. Go to the tab with the button in the Main Operations panel Approach (Fig. 9-36). Approach Fig. 9-36. Control panel of the b.

  • Page 51: Other Capabilities

    Chapter 10. Other Capabilities 10. Other Capabilities 10.1. AFM Measurements Availability of the AFM measuring head allows for measurements with Atomic-Force Microscopy. For details on measurements with the AFM measuring head, refer to the manual Performing measurements. 10.2. SNOM Measurements Availability of the SNOM measuring head allows for measurements with Scanning Near- field Optical Microscopy.
  • Page 52 NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Renishaw Spectrometer). Aligning the probe tip along the lens optical axis 1. Find the probe resonance frequency. For details on finding the resonance frequency, refer to the manual PNL NTEGRA Solaris, Ch. 4.1.
  • Page 53 Chapter 10. Other Capabilities 5. Moving the head in the XY plane (Fig. 10-4), bring the spots both from the SNOM head laser and from the spectrometer laser into coincidence. Fig. 10-4. Moving screws of the measuring head 1 – X-movement screw; 2 – Y-movement screw 6.
  • Page 54 NTEGRA Spectra Probe NanoLaboratory. (Inverted Configuration with Renishaw Spectrometer). Range Spectral acquisition setup Fig. 10-5. tab of the window 4. Go to the tab by selecting the corresponding title. Range 5. In the drop-down list of the panel, select the laser employed...

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