Keysight Technologies B1500A User Manual page 58

Semiconductor device analyzer
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CAUTION
WARNING
WARNING
Introduction
Rear View
under test (DUT). Also the Lcur and Lpot have to be connected together at the
other terminal of the DUT. Then, the guard lines of four-terminal pair must be
connected together.
Do not apply voltage more than ±25 V to the MFCMU input terminals. Failure to
heed this caution may result in damage to the module.
To avoid electrical shock and instrument damage, turn the all instruments off
before connecting or disconnecting measurement cable.
There are potentially hazardous voltages (± 200 V for HPSMU, and ± 100 V for
MPSMU/HRSMU) present at the Force, Sense, and Guard terminals of this
instrument. To prevent electrical shock, the following safety precautions must
be observed during the use of the instrument.
Use a three-conductor AC power cable to connect the instrument to an
electrical ground (safety ground).
If you do not use the B1500A-A5F/16442A/B test fixture, you must install
and connect an interlock circuit that opens the Interlock terminal when the
shielding box access door is opened.
If you change the DUT interface, test fixture, prober, and such, connect an
interlock cable to the one actually used.
Confirm periodically that the interlock function works normally.
Before touching the connections on the Force, Guard, and Sense terminals
in the test fixture or the shielding box, turn the instrument off and
discharge any capacitors. If you do not turn the instrument off, complete all
of the following items, regardless of the instrument settings.
Press the front panel
Confirm that the front panel High Voltage indicator is not lit.
Open the Interlock terminal (open the fixture cover or the shielding box
access door).
Discharge any capacitors connected to a measurement resource.
Warn persons working around the instrument about dangerous conditions.
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key to set the module output off.
Stop
Keysight B1500A User's Guide, Ed ition 14

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